IP Library Granted Patent US 7,699,480
Granted Patent B2
US 7,699,480 · App. 12/341,597 · Granted Apr 20, 2010

High positioning reproducible low torque mirror-actuator interface

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Quick Facts
Patent No.
US 7,699,480
App. No.
12/341,597
Granted
Apr 20, 2010
Kind
B2
Abstract

The present high positioning reproducible mirror-actuator interface disclosed herein overcomes the deficiencies associated with conventional interface systems and offer a number of advantages that are disclosed herein. Generally, the mirror mounts provide a reliable and robust interface between the mirrors and actuators, that serve to move and position the mirrors, as wells as providing an interface between the mirrors and gravity compensator pins. The mirror mount is characterized as having a body that has an outer peripheral wall that includes a plurality of flexible elements around the perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane. The body is open at the first end to allow flexing of the flexible elements. The flexible elements providing a direct coupling interface between the mirror mount and the mirror. The flexible elements of the mirror mount provides a number of advantages and increases the performance capabilities of the first mechanical interface between the mirror mount and the actuator.

Claims (13)

1. A mirror mount for providing an interface between a mirror and another component, the mirror mount comprising:

a body having a first end and an opposing second end, the body including a plurality of flexible finger elements around a perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane, the body being open at the first end to allow flexing of the flexible elements;

the body has a first surface facing the first end and an opposing second surface facing the second end, the finger elements forming an upright outer peripheral wall of the body; and

the first surface is defined in part by a substantially planar annular platform that includes an outer peripheral edge that is spaced from the finger elements by an annular space, the platform having an upper surface that includes a plurality of elevated contact surfaces that are raised relative to surrounding portions of the upper surface, the elevated contact surfaces extending to the outer peripheral edge.

2. The mirror mount of claim 1 , wherein the body includes a feature formed therein for providing a coupling interface between the mirror and the other component.

3. The mirror mount of claim 1 , wherein each of the flexible finger elements includes an injection port formed therethrough for injecting a material therethrough to facilitate bonding between the mirror and the mirror mount.

4. The mirror mount of claim 1 , wherein the annular platform has a plurality of first openings formed therethrough such that the first openings are open at the first surface and the second surface of the body for receiving complementary members associated with the other component for mounting the other component to the mirror mount.

5. The mirror mount of claim 1 , further including:

a central hub extending outwardly away from the upper surface of the platform, the central hub having a plurality of first openings formed therethrough such that they are open at the second surface of the body.

6. The mirror mount of claim 5 , wherein the central hub and the platform body have a retaining space formed therein and defined by a first section, a second section, and an intermediate section, the first section being open at a top face of the central hub and in communication with the first openings through radial slots formed in the central hub, the intermediate section being of a tapered construction such that a cross-sectional area of the second section is greater than a cross-sectional area of the first section.

7. The mirror mount of claim 5 , wherein a body of the central hub has a cavity formed therein, the body being formed so that it has a feature that serves as an interference surface that restricts passage from a lower section of the cavity to an upper section that is open at a top face of the central hub, the first and second sections being in selective communication with the first openings.

8. The mirror mount of claim 7 , wherein the interference surface is a non-planar surface and the other component is a static force actuator pin that is disposed in a location that coincides with a line of force of other actuators and at a neutral plane of the mirror.

9. The mirror mount of claim 1 , wherein the body includes an aperture formed therein for receiving a member that rotationally positions the mirror mount on the other component.

Assignments (2)
SECURITY INTEREST Recorded Sep 29, 2025
From: HUGHES NETWORK SYSTEMS, LLC
To: U.S. BANK NATIONAL ASSOCIATION
Reel/Frame 072955/0166 →
A MODIFYING CONVERSION Recorded Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →