Methods and systems for semiconductor testing using reference dice
View Patent ↗Methods and systems of semiconductor testing where reference dice and non-reference dice in a wafer and/or lot are tested differently. In one embodiment of the invention, geography, lithography exposure, other characteristics, performance and/or behavior are taken into account when selecting reference dice, thereby improving the likelihood that the response of reference dice to testing is well representative of the wafer and/or lot. In one embodiment, based on data from the testing of reference dice, the test flow for non-reference dice and/or other testing may or may not be adjusted.
1. A computer program product comprising a computer useable medium having computer readable program code embodied therein of semiconductor testing, the computer program product comprising:
computer readable program code for causing the computer to determine a group of semiconductor dice in a wafer which can be assumed to respond similarly to testing, wherein said group includes less than all dice in said wafer; and
computer readable program code for causing the computer to select at least one reference die from said group for testing differently than other dice in said group which were not selected as reference dice, wherein said at least one reference die includes less than all dice in said group.
2. A computer program product comprising a computer useable medium having computer readable program code embodied therein of semiconductor testing, the computer program product comprising:
computer readable program code for causing the computer to identify or not identify a semiconductor die provided for testing as a reference die which had been previously selected as representative of a group of dice in a wafer that can be assumed to respond similarly to testing, wherein said group includes less than all dice in said wafer, and wherein less than all dice in said group had been previously selected as a reference die;
computer readable program code for causing the computer to test said die with a reference die test flow if said die is identified as a reference die; and
computer readable program code for causing the computer to test said die with a non-reference die test flow if said die is not identified as a reference die.