IP Library Granted Patent US 7,709,871
Granted Patent B2
US 7,709,871 · App. 12/347,028 · Granted May 4, 2010

CMOS image sensor and method for manufacturing the same

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Quick Facts
Patent No.
US 7,709,871
App. No.
12/347,028
Granted
May 4, 2010
Kind
B2
Abstract

A CIS and a method for manufacturing the same are provided. The CIS includes an interlayer insulation layer formed on a substrate having a photodiode and a transistor formed thereon; a plurality of color filters formed on the interlayer insulation layer and spaced a predetermined interval apart from each other; a metal sidewall formed to fill the predetermined interval between the plurality of the color filters; and a microlens formed on each of the plurality of color filters.

Claims (18)

1. A CIS (complementary metal oxide silicon image sensor) comprising:

an interlayer insulation layer formed on a substrate having a photodiode and a transistor formed thereon;

a plurality of color filters formed on the interlayer insulation layer and spaced a predetermined interval apart from each other;

a metal sidewall formed to fill the predetermined interval between the plurality of the color filters; and

a microlens formed on each of the plurality of color filters.

2. The CIS according to claim 1 , wherein the plurality of color filters comprise a red color filter, a green color filter, and a blue color filter.

3. The CIS according to claim 2 , wherein the metal sidewall is formed on side surfaces of the green color filter.

4. The CIS according to claim 1 , wherein the metal sidewall is formed of an opaque metal.

5. The CIS according to claim 4 , wherein the opaque metal is one selected from the group consisting of Al, Cr, Mo, and Ti.

6. The CIS according to claim 1 , further comprising a planarization layer on an entire upper surface of the substrate including the plurality of color filters.

7. A CIS (complementary metal oxide silicon image sensor) comprising:

an interlayer insulation layer formed on a substrate having a photodiode and a transistor formed thereon;

a first color filter formed on the interlayer insulation layer;

metal sidewalls formed on side surfaces of the first color filter;

a second color filter formed at one side of the first color filter with the metal sidewall interposed between the first color filter and the second color filter;

a third color filter formed on another side of the first color filter with the metal sidewall interposed between the first color filter and the third color filter; and

microlenses formed on the first, second, and third color filters.

8. The CIS according to claim 7 , wherein the first color filter is a green color filter.

Assignments (3)
CHANGE OF NAME Recorded Nov 3, 2021
From: CONVERSANT INTELLECTUAL PROPERTY INC.
To: MOSAID TECHNOLOGIES INCORPORATED
Reel/Frame 058793/0785 →
AMENDED AND RESTATED U.S. PATENT SECURITY AGREEMENT (FOR NON-U.S. GRANTORS) Recorded Aug 22, 2018
From: CONVERSANT INTELLECTUAL PROPERTY MANAGEMENT INC.
To: CPPIB CREDIT INVESTMENTS, INC.
Reel/Frame 046900/0136 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 11, 2017
From: DONGBU HITEK CO. LTD.; DONGBU ELECTRONICS CO., LTD.
To: CONVERSANT INTELLECTUAL PROPERTY MANAGEMENT INC.
Reel/Frame 041330/0143 →