Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber. The apparatus may further include a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.
1 - 13 . (canceled)
14 . An apparatus for manufacturing a magnetic recording disk, comprising:
a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited onto a substrate;
a lubricant-layer preparation chamber in which a lubricant layer is prepared onto the substrate under a vacuum pressure after the magnetic film is deposited; and
a cleaning chamber in which the substrate is cleaned under a vacuum pressure alter deposition in the magnetic-film chamber and before preparation in the lubricant-layer chamber.
15 . An apparatus for manufacturing a magnetic recording disk, as claimed in claim 14 , further comprising
a gas introduction system introducing oxygen gas into the cleaning chamber, and
a power supply to form a plasma of introduced oxygen gas to oxidize contaminants adhering to the substrate into volatile oxides, thereby removing the contaminants.
16 . An apparatus for manufacturing a magnetic recording disk, as claimed in claim 15 , further comprising an electrode provided in the cleaning chamber, wherein the power supply applies an HF voltage to the electrode.
17 . An apparatus for manufacturing a magnetic recording disk, as claimed in claim 14 , further comprising a laser oscillator oscillating a laser beam to irradiate contaminants adhering to the substrate in the cleaning chamber, thereby removing the contaminants.
18 . An apparatus for manufacturing a magnetic recording disk, as claimed in claim 14 , further comprising a nozzle ejecting a gas toward the substrate in the cleaning chamber to blow away contaminants adhering to the substrate.
19 . An apparatus for manufacturing a magnetic recording disk, as claimed in claim 14 , further comprising a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.