Bonding structure and semiconductor device manufacturing apparatus
A bonding structure according to the present invention includes: a ceramic member including a hole; a terminal embedded in the ceramic member and including an exposed surface exposed to a bottom portion of the hole; a brazed bond layer formed in contact with the exposed surface of the terminal; and a connecting member inserted in the hole, and bonded to the terminal via the brazed bond layer. An inner diameter of the hole is larger than an outer diameter of the connecting member. A clearance is formed between the hole and the connecting member when the connecting member is inserted in the hole. A braze pool space is formed in a surface of the hole and has a substantially semicircular shape in a cross-sectional plane. The braze pool space is partially filled with a braze material.
1. A bonding structure comprising:
a ceramic member including a hole;
a terminal embedded in the ceramic member, including an exposed surface exposed to a bottom surface of the hole, and made of a refractory metal having a thermal expansion coefficient substantially equal to a thermal expansion coefficient of the ceramic member;
a brazed bond layer in contact with the exposed surface of the terminal; and
a connecting member inserted in the hole, bonded to the terminal via the brazed bond layer, and made of a refractory metal having a thermal expansion coefficient substantially equal to the thermal expansion coefficient of the ceramic member; wherein
an inner diameter of the hole is larger than an outer diameter of the connecting member,
a clearance between a side surface of the hole and the connecting member when the connecting member is inserted in the hole,
a braze pool space is formed in the ceramic member in a part of the side surface of the hole,
the braze pool space has a substantially semicircular shape in a cross-sectional plane parallel with a main surface of the ceramic member, and
the braze pool space is partially filled with a braze material to lock the connecting member to the ceramic member.
2. The bonding structure according to claim 1 , wherein
the connecting member includes a protruded portion having a substantially semicircular shape in the cross-sectional plane, and the braze pool space and the protruded portion define a locking portion.
3. The bonding structure according to claim 1 , wherein
the connecting member includes a recessed portion on a circumferential surface of the connecting member, and
the recessed portion is partially filled with a braze material.
4. The bonding structure according to claim 1 , wherein
a groove filled with a braze material is on the exposed surface of the terminal, and the braze material filling the groove serves as an anchor.
5. The bonding structure according to claim 1 , wherein
the number of braze pool spaces in the surface of the hole is two to four.
6. The bonding structure according to claim 5 , wherein
one pair or two pairs of the braze pool spaces are at a mutually-opposed location in the surface of the hole.
7. A semiconductor device manufacturing apparatus comprising the bonding structure according to claim 1 , wherein
the ceramic member is made of aluminum nitride, and
the refractory metal having the thermal expansion coefficient substantially equal to the thermal expansion coefficient of the ceramic member is molybdenum.