Repair method for optical elements having a coating and corresponding optical elements
View Patent ↗A method for repairing optical elements having a coating, in which the coating is fully or partially removed or left on the optical element, a polishing layer being provided in the coating or a polishing layer being applied, which allows simple processing of the surface to achieve high geometrical accuracy and lower surface roughness. A new coating is applied onto the corresponding polishing layer. Also addressed are corresponding optical elements, including optical elements recycled according to the method.
1. Optical element having a substrate and a coating, the coating comprising a functional coating and a cleaving layer, wherein
the cleaving layer is a polishing layer processed more geometrically accurately and with lower surface roughness than the substrate.
2. Optical element according to claim 1 , wherein
the optical element is a recycled optical element and the polishing layer comprises a surface-processed layer.
3. Optical element according to claim 1 , wherein
the polishing layer comprises a first sublayer which remains after partial cleaving, and a second sublayer which is deposited onto the unprocessed or surface-processed first sublayer.
4. Optical element according to claim 1 , wherein
the optical element is a mirror or a collector for extreme-ultraviolet light lithography.
5. Optical element according to claim 1 , wherein
the cleaving layer covers the substrate and the functional coating covers the cleaving layer, forming a layer stack.
6. Optical element according to claim 1 , wherein the optical element is configured as a mirror in a projection exposure apparatus for extreme ultraviolet light.
7. Optical element according to claim 6 , wherein the mirror is a collector.