Semiconductor device including wiring and manufacturing method thereof
View Patent ↗A semiconductor construct is provided which has a semiconductor substrate, an external connection electrode, and an electrode enveloping layer for enveloping the external connection electrode. Also, a base plate is provided which includes a wiring having a first opening corresponding to the external connection electrode. Subsequently, the base plate is removed after the semiconductor construct is fixed to the base plate, and a second opening which reaches the external connection electrode is formed on the electrode enveloping layer corresponding to the first opening of the wiring. Then, a connection conductor for electrically connecting the wiring and the external connection electrode is formed.
1. A semiconductor device, comprising:
a semiconductor construct having a semiconductor substrate, an external connection electrode formed on the semiconductor substrate and an electrode enveloping layer which has a second opening that exposes at least a portion of the external connection electrode;
an insulating layer formed around a periphery of the semiconductor construct;
a wiring which is formed below the semiconductor construct and below the insulating layer and including a connection pad having a first opening which is formed at the position corresponding to the external connection electrode; and
a connection conductor for electrically connecting the external connection electrode to the wiring via the second opening and the first opening.
2. The semiconductor device according to claim 1 , wherein a protective film is formed on the semiconductor substrate and the external connection electrode is configured as a portion of the wiring formed on the protective film.
3. The semiconductor device according to claim 1 , further comprising:
an insulating film for covering the wiring.
4. The semiconductor device according to claim 3 , wherein the insulating film has a third opening corresponding to the first opening, and the connection conductor protrudes onto the insulating film via the third opening.
5. The semiconductor device according to claim 3 , wherein the wiring is formed in such a manner to protrude from a top surface of the insulating film and to be embedded in a thickness direction of the electrode enveloping layer of the semiconductor construct and the insulating layer.
6. The semiconductor device according to claim 1 , further comprising:
an insulating film formed between the electrode enveloping layer of the semiconductor construct and the wiring, and between the insulating layer and the wiring.
7. The semiconductor device according to claim 6 , wherein the wiring is formed in such a manner to be embedded in the insulating film.
8. The semiconductor device according to claim 1 , wherein a circuit board is embedded in the insulating layer.
9. The semiconductor device according to claim 1 , further comprising:
a metallic protective layer for at least partly covering a surface of the external connection electrode.
10. The semiconductor device according to claim 1 , wherein the semiconductor construct further includes a protective film formed on the semiconductor substrate and a wiring member formed on the protective film; the external connection electrode is formed on the wiring member and has a columnar configuration.
11. The semiconductor device according to claim 1 , wherein the insulating layer has a section that covers a back surface of the semiconductor substrate.