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App. No. 12/359,657 · Confirmation No. 4831

Apparatus and method for processing a wafer

Inventor: Robert Aigner
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2014-04-23 ABN Abandonment 2 View
2014-04-23 BIB Bibliographic Data Sheet 1 View
2013-09-06 CTFR Final Rejection 9 View
2013-09-06 892 List of references cited by examiner 1 View
2013-09-06 FWCLM Index of Claims 2 View
2013-09-06 SRFW Search information including classification, databases and other search related notes 1 View
2013-09-06 SRNT Examiner's search strategy and results 7 View
2013-09-06 1449 List of References cited by applicant and considered by examiner 1 View
2013-09-06 1449 List of References cited by applicant and considered by examiner 1 View
2013-09-06 BIB Bibliographic Data Sheet 1 View
2013-07-03 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2013-07-03 CLM Claims 4 View
2013-07-03 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2013-07-03 WFEE Fee Worksheet (SB06) 2 View
2013-07-03 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-07-03 XT/ Extension of Time 2 View
2013-07-03 WFEE Fee Worksheet (SB06) 1 View
2013-03-06 CTNF Non-Final Rejection 7 View
2013-03-06 892 List of references cited by examiner 1 View
2013-03-06 BIB Bibliographic Data Sheet 1 View
2013-03-06 SRNT Examiner's search strategy and results 4 View
2013-03-06 1449 List of References cited by applicant and considered by examiner 1 View
2013-03-06 SRFW Search information including classification, databases and other search related notes 1 View
2013-03-06 FWCLM Index of Claims 2 View
2013-03-06 1449 List of References cited by applicant and considered by examiner 1 View
2013-02-05 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2013-02-05 CLM Claims 4 View
2013-02-05 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2013-02-05 WFEE Fee Worksheet (SB06) 2 View
2013-02-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-02-05 XT/ Extension of Time 2 View
2013-02-05 WFEE Fee Worksheet (SB06) 1 View
2012-10-05 CTNF Non-Final Rejection 10 View
2012-10-05 892 List of references cited by examiner 1 View
2012-10-05 SRNT Examiner's search strategy and results 6 View
2012-10-05 1449 List of References cited by applicant and considered by examiner 1 View
2012-10-05 SRFW Search information including classification, databases and other search related notes 1 View
2012-10-05 FWCLM Index of Claims 2 View
2012-10-05 BIB Bibliographic Data Sheet 1 View
2012-10-05 1449 List of References cited by applicant and considered by examiner 1 View
2012-01-17 RCEX Request for Continued Examination (RCE) 3 View
2012-01-17 WFEE Fee Worksheet (SB06) 2 View
2012-01-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-01-17 XT/ Extension of Time 2 View
2012-01-17 WFEE Fee Worksheet (SB06) 1 View
2011-12-16 CTAV Advisory Action (PTOL-303) 3 View
2011-12-16 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 2 View
2011-09-28 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 2 View
2011-09-28 CLM Claims 4 View
2011-09-28 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2011-09-28 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-09-28 WFEE Fee Worksheet (SB06) 1 View
2011-07-28 CTFR Final Rejection 10 View
2011-07-28 892 List of references cited by examiner 1 View
2011-07-28 FWCLM Index of Claims 2 View
2011-07-28 SRFW Search information including classification, databases and other search related notes 1 View
2011-07-28 BIB Bibliographic Data Sheet 1 View
2011-07-28 SRNT Examiner's search strategy and results 4 View
2011-07-28 1449 List of References cited by applicant and considered by examiner 1 View
2011-07-28 1449 List of References cited by applicant and considered by examiner 1 View
2011-04-06 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2011-04-06 CLM Claims 4 View
2011-04-06 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2011-04-06 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-04-06 WFEE Fee Worksheet (SB06) 1 View
2011-01-06 CTNF Non-Final Rejection 12 View
2011-01-06 892 List of references cited by examiner 1 View
2011-01-06 BIB Bibliographic Data Sheet 1 View
2011-01-06 SRNT Examiner's search strategy and results 4 View
2011-01-06 SRFW Search information including classification, databases and other search related notes 1 View
2011-01-06 FWCLM Index of Claims 2 View
2011-01-06 1449 List of References cited by applicant and considered by examiner 1 View
2011-01-06 1449 List of References cited by applicant and considered by examiner 1 View
2010-12-03 TRAN.LET Transmittal Letter 2 View
2010-12-03 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2010-12-03 FOR Foreign Reference 13 View
2010-12-03 FOR Foreign Reference 13 View
2010-12-03 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-09-10 NTC.PUB Notice of Publication 1 View
2009-06-03 APP.FILE.REC Filing Receipt 3 View
2009-05-28 WFEE Fee Worksheet (SB06) 5 View
2009-05-20 PEFR Applicant Response to Pre-Exam Formalities Notice 5 View
2009-05-20 OATH Oath or Declaration filed 1 View
2009-05-20 PEFR Applicant Response to Pre-Exam Formalities Notice 1 View
2009-05-20 SPEC Specification 1 View
2009-05-20 ABST Abstract 1 View
2009-05-20 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2009-05-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-02-20 NTC.MISS.PRT Notice to File Missing Parts 2 View
2009-02-20 APP.FILE.REC Filing Receipt 3 View
2009-02-13 TRAN.LET Transmittal Letter 2 View
2009-02-13 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2009-02-13 FOR Foreign Reference 1 View
2009-02-13 FOR Foreign Reference 22 View
2009-02-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-02-09 WFEE Fee Worksheet (SB06) 1 View
2009-01-26 TRNA Transmittal of New Application 1 View
2009-01-26 OATH Oath or Declaration filed 1 View
2009-01-26 ADS Application Data Sheet 3 View
2009-01-26 A.PE Preliminary Amendment 2 View
2009-01-26 SPEC Specification 1 View
2009-01-26 CLM Claims 4 View
2009-01-26 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2009-01-26 SPEC Specification 19 View
2009-01-26 CLM Claims 7 View
2009-01-26 DRW Drawings-only black and white line drawings 4 View
2009-01-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-01-26 WFEE Fee Worksheet (SB06) 1 View
2009-01-26 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
12/359,657
Filed
2009-01-26
Pub. No.
US20090224180A1
Art Unit
2881