Semiconductor embedded resistor generation
View Patent ↗Generating an embedded resistor in a semiconductor device includes forming a shallow trench isolation (STI) region in a substrate; forming a pad oxide on the STI region and substrate; depositing a silicon layer on the pad oxide; forming a photo-resist mask on a portion of the silicon layer disposed above the STI region; etching the silicon layer to yield a polyconductor above the STI region; oxidizing the polyconductor; depositing an oxide material or a metal gate material on the oxidized surface; depositing a silicon layer on the oxide material or metal gate material; depositing additional silicon on a portion of the silicon layer above the STI region; patterning a transistor gate with a photo-resist mask on another portion of the silicon layer away from the STI region; and etching the silicon layer to yield a transistor structure away from the STI region and a resistor structure above the STI region.
1. A method for generating an embedded resistor in a semiconductor device, the method comprising:
forming a shallow trench isolation (STI) region in a substrate;
forming a pad oxide on the STI region and substrate;
depositing a first silicon layer on the pad oxide;
forming a photo-resist mask on a portion of the first silicon layer disposed substantially above the STI region;
etching the first silicon layer to yield a polyconductor (PC) disposed substantially above the STI region;
oxidizing the PC;
depositing at least one of an oxide material or a metal gate material on the oxidized surface;
depositing a second silicon layer on the at least one oxide material or metal gate material;
depositing additional silicon on a portion of the second silicon layer disposed substantially above the STI region;
patterning a transistor gate with a photo-resist mask disposed on another portion of the second silicon layer disposed substantially away from the STI region; and
etching the second silicon layer to yield at least one transistor structure disposed substantially away from the STI region and at least one resistor structure disposed substantially above the STI region.
2. The method of claim 1 , further comprising forming a silicide portion on at least one of the transistor or resistor structures.
3. The method of claim 2 wherein the at least one of the transistor or resistor structures with silicide forms an eFUSE.
4. The method of claim 1 , further comprising forming at least one spacer around each of the transistor and resistor structures.
5. The method of claim 4 wherein the at least one spacer is disposed directly on the substrate.
6. The method of claim 4 wherein the at least one spacer comprises an insulating material.
7. The method of claim 1 , further comprising forming an insulating layer above the transistor and resistor structures.
8. The method of claim 1 wherein the step of forming a photo-resist mask on a portion of the first silicon layer disposed substantially above the STI region is the only photo step added for forming a resistor structure.
9. The method of claim 1 wherein the final resistance of the resistor structure is adjusted by changing the thickness of the first silicon layer.
10. The method of claim 1 wherein an isolation area is defined by using the STI formation process.
11. The method of claim 1 , further comprising performing well ion-implantation (IIP) in the same step where the pad oxide is formed with oxidation.
12. The method of claim 11 wherein the IIP is applied to a channel using a Vt Taylor process.
13. The method of claim 1 wherein the thickness of the first silicon layer is between about 0 Angstroms and about 2000 Angstroms.
14. The method of claim 1 , further comprising planarizing the STI region and substrate prior to forming the pad oxide.
15. The method of claim 1 wherein oxidizing the PC comprises at least one of processing with single-gate (SG) oxide, extended-gate (EG) oxide, dual-gate (DG) oxide, triple-gate (TG) oxide, quadruple or higher number of oxides.
16. The method of claim 1 wherein depositing at least one of an oxide material or a metal gate material on the oxidized surface comprises depositing a High-K material and a metal gate material.
17. The method of claim 16 wherein the High-K material comprises at least one of HfO2, AIO, ZrO2, TiO2, or like materials.
18. The method of claim 1 wherein depositing at least one of an oxide material or a metal gate material on the oxidized surface comprises depositing an oxide material and a metal gate material.
19. The method of claim 18 wherein the oxide material comprises at least one of SiO2, SiON, DPN oxide, RPN oxide, or like materials.
20. The method of claim 1 wherein the metal gate material comprises TiN or like materials.
21. The method of claim 1 wherein the silicon comprises Polycrystalline Silicon (Poly-Si).