Controlling template surface composition in nano-imprint lithography
View Patent ↗A nano-imprint lithography process includes forming a multiplicity of hydroxyl groups on a surface of a substantially inorganic nano-imprint lithography template, heating the template, and reacting a pre-selected percentage of the hydroxyl groups on the surface of the template with a mono-functional, non-fluorinated compound to form a monolayer coating on the surface of the nano-imprint lithography template. The coated template may be contacted with a polymerizable composition disposed on a nano-imprint lithography substrate, and the polymerizable composition solidified to form a patterned layer. The coated template is separated from the patterned layer.
1. A method comprising:
forming a multiplicity of hydroxyl groups on a surface of a substantially inorganic nano-imprint lithography template, wherein the hydroxyl groups are covalently bonded to atoms on the surface of the template;
decomposing hexamethyldisilazane, and reacting about 20% to about 70% of the hydroxyl groups on the surface of the template with the decomposed hexamethyldisilazane to form a monolayer coating of trimethylsilyl groups on the surface of the nano-imprint lithography template, thereby yielding a coated nano-imprint lithography template comprising unreacted hydroxyl groups on the surface of the coated nano-imprint lithography template; and
contacting the surface of the coated nano-imprint lithography template with a surfactant comprising a polar end and a fluorinated non-polar end, thereby forming non-covalent interactions between the polar end of the surfactant and at least some of the unreacted hydroxyl groups on the surface of the coated nano-imprint lithography template.
2. The method of claim 1 , wherein the nano-imprint lithography template comprises silicon, and the hydroxyl groups are bonded to silicon atoms on the surface of the nano-imprint lithography template.
3. The method of claim 1 , wherein the monolayer is not crosslinked.
4. The method of claim 1 , wherein about 30% to about 60% of the hydroxyl groups on the surface of the template are reacted with the decomposed hexamethyldisilazane to form the monolayer coating on the surface of the nano-imprint lithography template.
5. The method of claim 1 , wherein contacting the surface of the coated nano-imprint lithography template with a the surfactant comprises contacting the surface of the coated nano-imprint lithography template with a polymerizable composition comprising the surfactant, wherein the polymerizable composition comprises at most about 0.3 wt % of the surfactant.
6. The method of claim 1 , wherein severed bonds in the monolayer coating react with moisture in situ to form additional hydroxyl groups on the surface of the template, and the additional hydroxyl groups interact with the surfactant to form non-covalent interactions between the polar end of the surfactant and the additional hydroxyl groups.
7. The method of claim 1 , further comprising contacting the coated nano-imprint lithography template with a polymerizable composition, wherein the polymerizable composition is substantially free of surfactant.
8. The method of claim 1 , wherein the monolayer coating is about 1 nm thick or less.
9. The method of claim 1 , further comprising heating the template after forming the multiplicity of hydroxyl groups on the surface of the substantially inorganic nano-imprint lithography template.
10. A method comprising:
forming a multiplicity of hydroxyl groups on a surface of a substantially inorganic nano-imprint lithography template, wherein the hydroxyl groups are covalently bonded to atoms on the surface of the template;
decomposing hexamethyldisilazane, and reacting about 20% to about 70% of the hydroxyl groups on the surface of the template with the decomposed hexamethyldisilazane to form a monolayer coating of trimethylsilyl groups on the surface of the nano-imprint lithography template, thereby yielding a coated nano-imprint lithography template comprising unreacted hydroxyl groups on the surface of the coated nano-imprint lithography template; and
contacting the surface of the coated nano-imprint lithography template with a first polymerizable composition comprising a surfactant having a polar end and a fluorinated non-polar end, thereby forming non-covalent interactions between the polar end of the surfactant and at least some of the unreacted hydroxyl groups on the surface of the coated nano-imprint lithography template,
wherein the contact angle of the first polymerizable composition on the surface of the coated nano-imprint lithography template is at least 5° less than the contact angle of a second polymerizable composition on the surface of an uncoated nano-imprint lithography template, wherein the second polymerizable composition has a surfactant content about 10 times greater than the surfactant content of the first polymerizable composition.
11. The method of claim 10 , wherein the nano-imprint lithography template comprises silicon, and the hydroxyl groups are bonded to silicon atoms on the surface of the nano-imprint lithography template.
12. The method of claim 10 , wherein about 30% to about 70% of the hydroxyl groups on the surface of the template are reacted with the decomposed hexamethyldisilazane to form the monolayer coating on the surface of the nano-imprint lithography template.