Group-III nitride compound semiconductor light-emitting device, method of manufacturing group-III nitride compound semiconductor light-emitting device, and lamp
The present invention provides a group-III nitride compound semiconductor light-emitting device having high productivity and good emission characteristics, a method of manufacturing a group-III nitride compound semiconductor light-emitting device, and a lamp. A method of manufacturing a group-III nitride compound semiconductor light-emitting device includes a step of forming on a substrate 11 a semiconductor layer made of a group-III nitride compound semiconductor including Ga as a group-III element using a sputtering method. The substrate 11 and a sputtering target are arranged so as to face each other, and a gap between the substrate 11 and the sputtering target is in the range of 20 to 100 mm. In addition, when the semiconductor layer is formed by the sputtering method, a bias of more than 0.1 W/cm 2 is applied to the substrate 11 . Further, when the semiconductor layer is formed, nitrogen and argon are supplied into a chamber used for sputtering.
1. A method of manufacturing a group-III nitride compound semiconductor light-emitting device, comprising:
a step of forming on a substrate a semiconductor layer made of a group-III nitride compound semiconductor including Ga as a group-III element using a sputtering method,
wherein the substrate and a sputtering target are arranged so as to face each other, and
a gap between the substrate and the sputtering target is in the range of 20 to 100 mm, and
when the semiconductor layer is formed by the sputtering method, an RF bias of not less than 0.1 W/cm 2 is applied to the substrate.
2. The method of manufacturing a group-III nitride compound semiconductor light-emitting device according to claim 1 ,
wherein the semiconductor layer is formed by a reactive sputtering method that introduces a nitride raw material into a reactor.
3. The method of manufacturing a group-III nitride compound semiconductor light-emitting device according to claim 2 ,
wherein nitrogen is used as the nitride raw material.
4. The method of manufacturing a group-III nitride compound semiconductor light-emitting device according to claim 1 ,
wherein a buffer layer made of a columnar crystal is formed between the substrate and the semiconductor layer.
5. The method of manufacturing a group-III nitride compound semiconductor light-emitting device according to claim 4 ,
wherein the buffer layer is formed by the sputtering method.
6. The method of manufacturing a group-III nitride compound semiconductor light-emitting device according to claim 4 ,
wherein the buffer layer is formed of a group-III nitride compound including Al as a group-III element.
7. The method of manufacturing a group-III nitride compound semiconductor light-emitting device according to claim 6 ,
wherein the buffer layer is formed of AlN.
8. The method of manufacturing a group-III nitride compound semiconductor light-emitting device according to claim 4 ,
wherein the buffer layer is formed so as to cover 90 % or more of the front surface of the substrate.
9. The method of manufacturing a group-III nitride compound semiconductor light-emitting device according to claim 4 ,
wherein the width of the columnar crystal forming the buffer layer is in the range of 0.1 to 100 nm.
10. The method of manufacturing a group-III nitride compound semiconductor light-emitting device according to claim 4 ,
wherein the thickness of the buffer layer is in the range of 10 to 500 nm.
11. The method of manufacturing a group-III nitride compound semiconductor light-emitting device according to claim 4 ,
wherein the buffer layer is formed of AlN, and the semiconductor layer made of the group-III nitride compound is formed of GaN.
12. The method of manufacturing a group-III nitride compound semiconductor light-emitting device according to claim 1 ,
wherein the substrate is formed of sapphire.
13. A group-III nitride compound semiconductor light-emitting device manufactured by the manufacturing method according to claim 1 .
14. A lamp comprising the group-III nitride compound semiconductor light-emitting device according to claim 13 .