Semiconductor device and semiconductor device manufacturing method
View Patent ↗The present invention provides a semiconductor device for which thermal stress at mounting is reduced and a reduction in reliability with regard to moisture absorption is prevented. The semiconductor device includes a uppermost metal layer 12 , a solder bump 17 , metals 15 and 16 which connect an uppermost metal layer 12 and the solder bump 17 , and, a polyimide multilayer 14 having formed therein an opening 14 x in which the metals 15 and 16 are provided. The polyimide multilayer 14 includes a first polyimide layer 14 A and a second polyimide layer 14 B formed on the first polyimide layer 14 A. The second polyimide layer 14 B is softer than the first polyimide layer 14 A. A thermal stress at mounting is reduced by the second polyimide layer 14 B. Since the first polyimide layer 14 A has a higher strength than the second polyimide layer 14 B, even if cracking occurs in the second polyimide layer 14 B, the cracks are prevented from developing in the first polyimide layer 14 A.
1. A semiconductor device comprising:
an uppermost metal layer;
a solder bump;
metal which connects the uppermost metal layer and the solder bump; and
a polyimide multilayer having formed therein an opening portion in which the metal is provided, wherein
the polyimide multilayer includes:
a first polyimide layer; and
a second polyimide layer formed on the first polyimide layer, and
the second polyimide layer is softer than the first polyimide layer and the first polyimide layer has a higher strength than the second polyimide layer.
2. The semiconductor device according to claim 1 , wherein
the polyimide multilayer includes a third polyimide layer formed on the second polyimide layer, and
the third polyimide layer is softer than the second polyimide layer.
3. The semiconductor device according to claim 1 , wherein the second polyimide layer has a lower elastic modulus than the first polyimide layer.
4. The semiconductor device according to claim 2 , wherein the third polyimide layer has a lower elastic modulus than the second polyimide layer.