Electron-beam dimension measuring apparatus and electron-beam dimension measuring method
View Patent ↗An electron-beam dimension measuring apparatus includes: electron-beam irradiating means for irradiating a surface of a sample with an electron beam; a stage on which the sample is placed; a photoelectron generating electrode disposed so as to face the sample; ultraviolet light irradiating means for emitting ultraviolet light; and control means for causing the ultraviolet light irradiating means to irradiate the sample and the photoelectron generating electrode with the ultraviolet light for a predetermined length of time, to cause the sample and the photoelectron generating electrode to emit photoelectrons, for applying a voltage to the photoelectron generating electrode, the voltage applied to supply energy corresponding to a difference between energy of photoelectrons emitted by the sample and energy of photoelectrons emitted by the photoelectron generating electrode, and thereby for controlling an electric potential of the surface of the sample to set the electric potential at 0 V. The control means measures the dimension of the sample after keeping the electric potential constant on the surface of the sample.
1. An electron-beam dimension measuring apparatus comprising:
electron-beam irradiating means for irradiating a surface of a sample with an electron beam;
a stage on which the sample is placed;
a photoelectron generating electrode disposed so as to face the sample;
ultraviolet light irradiating means for emitting ultraviolet light; and
control means controls operations of:
measuring a dimension of a calibration sample of known dimension by irradiating the electron beam thereon where the calibration sample is grounded so that its surface potential is 0 V,
causing the ultraviolet light irradiating means to irradiate both the sample and the photoelectron generating electrode with the ultraviolet light at the same time for a predetermined length of time, to cause the sample and the photoelectron generating electrode to emit photoelectrons,
measuring a dimension of the sample by irradiating the electron beam thereon,
applying a voltage to the photoelectron generating electrode in such a way that the measured dimension of the sample becomes identical to or within a predetermined difference from the measured dimension of the calibration sample, where the voltage differs from 0 V by a difference between energy of photoelectrons emitted by the sample and energy of photoelectrons emitted by the photoelectron generating electrode, and
thereby controlling an electric potential of the surface of the sample to 0 V.
2. The electron-beam dimension measuring apparatus according to claim 1 , wherein
the predetermined length of time is a time length required until a first measurement value and a second measurement value become equal to each other, where the first measurement value is obtained by measurement of the dimension of the calibration sample and the second measurement value is obtained by measuring the dimension of the sample after irradiating the sample with the ultraviolet light.
3. The electron-beam dimension measuring apparatus according to claim 1 , wherein
the ultraviolet light has energy larger than a work function of the sample and a work function of the photoelectron electrode.
4. The electron-beam dimension measuring apparatus according to claim 1 , wherein
the photoelectron generating electrode is disposed so as to face the sample in such a way as to cover an entire surface of the sample.
5. The electron-beam dimension measuring apparatus according to claim 1 , further comprising
an objective lens with an electrostatic lens disposed at a lower end portion of the objective lens,
wherein the control means causes the ultraviolet light irradiating means to emit the ultraviolet light without applying any voltage to the objective lens.
6. The electron-beam dimension measuring apparatus according to claim 1 , further comprising
an objective lens with an electrostatic lens disposed at a lower end portion of the objective lens,
wherein the control means causes the ultraviolet light irradiating means to irradiate, with the ultraviolet light, a range not influenced by an electric field generated by applying a voltage to the objective lens, in the sample and photoelectron generating electrode.
7. The electron-beam dimension measuring apparatus according to claim 1 , wherein
the control means measures various dimensions of the sample after establishing the constant electric potential of 0 V on the surface of the sample.
8. An electron-beam dimension measuring method for an electron-beam dimension measuring apparatus including: electron-beam irradiating means for irradiating an electron beam onto a surface of a sample; a stage on which the sample is placed; a photoelectron generating electrode disposed so as to face the sample; and ultraviolet light irradiating means for emitting ultraviolet light,
the method comprising the steps of:
measuring a dimension of a calibration sample of known dimension by irradiating the electron beam thereon where the calibration sample is grounded so that its surface potential is 0 V
causing the ultraviolet light irradiating means to irradiate both the sample and the photoelectron generating electrode with the ultraviolet light at the same time for a predetermined length of time, to cause the sample and the photoelectron generating electrode to emit photoelectrons,
measuring a dimension of the sample by irradiating the electron beam thereon,
applying a voltage to the photoelectron generating electrode in such a way that the measured dimension of the sample becomes identical to or within a predetermined difference from the measured dimension of the calibration sample, where the voltage differs from 0 V by a difference between energy of photoelectrons emitted by the sample and energy of photoelectrons emitted by the photoelectron generating electrode, and
thereby controlling an electric potential of the surface of the sample to 0 V.
9. The electron-beam dimension measuring method according to claim 8 , wherein
the predetermined length of time is a time length required until a first measurement value and a second measurement value become equal to each other, where the first measurement value is obtained by measurement of the dimension of the calibration sample and the second measurement value is obtained by measuring the dimension of the sample after irradiating the sample with the ultraviolet light.
10. The electron-beam dimension measuring method according to claim 8 , wherein
the ultraviolet light has energy larger than a work function of the sample and a work function of the photoelectron electrode.