MEMS thermal actuator and method of manufacture
View Patent ↗A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.
1. A method for forming a micromechanical actuator, comprising:
etching a cavity into a device layer, the device layer formed in a plane of a silicon-on-insulator substrate;
filling the cavity with an inlaid metallic material, wherein the inlaid metallic material is configured to move substantially in the plane of the device layer;
forming a silicon member from the device layer of the silicon-on-insulator substrate, wherein the silicon member is configured to move substantially in the plane of the device layer about an anchor point; and
etching a dielectric layer of the silicon-on-insulator substrate to release the inlaid metallic material and the silicon member, such that the movement of the inlaid metallic material drives movement of the silicon member.
2. The method of claim 1 , further comprising:
planarizing the inlaid metallic material using chemical mechanical polishing, to be substantially flush with the device layer surrounding the inlaid metallic material.
3. The method of claim 1 , wherein forming the silicon member from the device layer comprises etching an outline of the silicon member using deep reactive ion etching.
4. The method of claim 1 , wherein filling the cavity with the inlaid material comprises plating a metallic material comprising at least one of nickel and a nickel alloy in the cavity of the device layer.
5. The method of claim 1 , further comprising:
forming an air gap slot in the device layer of the silicon-on-insulator substrate, which will separate the inlaid metallic material from the silicon member.
6. The method of claim 5 , further comprising:
forming at least one additional layer over surfaces defining the air gap slot, wherein a minimum separation of the surfaces of the additional layer defines a minimum dimension of the air gap slot.
7. The method of claim 1 , further comprising:
forming a metal electrode over the silicon member, the metal electrode overhanging a wall on a distal end of the silicon member, the wall being oriented substantially perpendicularly with respect to the plane of the device layer.
8. The method of claim 1 , further comprising:
etching a cavity into the device layer;
filling the cavity with a conductive contact material, wherein the conductive contact material is configured to move substantially in the plane of the device layer, when released from the dielectric layer, and is contiguous with a distal end of the silicon member.
9. The method of claim 1 , further comprising:
forming vias in the silicon-on-insulator substrate, wherein the vias extend at least partially into a handle layer of the silicon-on-insulator substrate;
removing material from the handle layer until the vias extend through the thickness of the silicon-on-insulator substrate.
10. The method of claim 1 , further comprising:
forming at least one device cavity in a lid wafer;
bonding the lid wafer to the silicon-on-insulator substrate, such that the inlaid metallic material and the silicon member are sealed in the at least one device cavity.
11. The method of claim 10 , further comprising:
forming vias through a thickness of the lid wafer; and
coupling the vias electrically to the inlaid metallic material to energize the inlaid material.