Semiconductor device and method of fabricating the same
View Patent ↗Provided is a semiconductor device including a transistor that has a silicide layer formed over a semiconductor substrate. The gate electrode of each transistor is composed of a polysilicon electrode and the silicide layer formed thereon. Each transistor further has source/drain impurity-diffused layers composed of low-concentration doped regions and high-concentration doped regions, and silicide layers formed over the source/drain impurity-diffused layers. The surface of each silicide layer is positioned above the surface of the semiconductor substrate. The silicide layers contain a silicidation-suppressive metal, and have a concentration profile of the silicidation-suppressive metal over a region of the silicide layers ranging from the surface to a predetermined depth, such as increasing the concentration from the surface of each silicide layer in the depth-wise direction of the semiconductor substrate.
1. A semiconductor device, comprising:
a semiconductor substrate;
a transistor provided over said semiconductor substrate; and
a silicide layer provided over impurity-diffused layers of said transistor,
wherein said silicide layer comprises a silicidation-suppressive metal, and
wherein a concentration of said silicidation-suppressive metal in said silicide layer, over a region thereof ranging from a surface of said semiconductor substrate to a predetermined distance, decreases upwardly from a reference plane defined at a level of the surface of said semiconductor substrate, and decreases downwardly in a depth-wise direction of said semiconductor substrate from the reference plane.
2. The semiconductor device as claimed in claim 1 , wherein said silicidation-suppressive metal is at least one species of metal selected from the group consisting of platinum (Pt), iridium (Ir), terbium (Tb), dysprosium (Dy), holmium (Ho), erbium (Er), thulium (Tm), and ytterbium (Yb).
3. The semiconductor device as claimed in claim 1 , wherein said silicide layer comprises a nickel silicide.
4. The semiconductor device as claimed in claim 3 , wherein said silicidation-suppressive metal comprises Pt.
5. The semiconductor device as claimed in claim 1 , further comprising:
sidewalls provided on side faces of a gate electrode of said transistor, each of said sidewalls comprising a first insulating film covering a side face of said gate electrode, and a part of a surface of a source-and-drain region of said transistor, impurity-diffused layer, and a second insulating film covering said first insulating film,
wherein edges of said first insulating film have a notched geometry recessed from edges of said second insulating film.
6. The semiconductor device as claimed in claim 1 , wherein said silicide layer comprises a single layer.
7. The semiconductor device as claimed in claim 1 , further comprising:
sidewalls provided on side faces of a gate electrode of said transistor,
wherein a portion of a surface of said silicon layer, which is located outside the sidewalls, is positioned above the surface of said semiconductor substrate.