Method and apparatus providing an optical guide in image sensor devices
A device and method for providing an optical guide of a pixel to guide incoming light to/from a photo-conversion device of the pixel to improve the optical crosstalk immunity. The optical guide includes an optically reflecting barrier formed as a trench filled with a material which produces reflection. The trench fill material may have an index of refraction that is less than the index of refraction of the material used for the trench surrounding layers to provide a light reflective structure or the trench fill material may provide a reflection surface.
1. An optical guide structure comprising:
a trench formed within a first material to continuously surround a lateral area of a photo-conversion device, the trench enclosing an area of the first material and defining an optical path through the area, the trench being filled with a second material having a property of producing reflection of light within the optical guide structure, the first material having a lower refractive index than the second material, wherein the second material comprises dielectric material, wherein the trench extends above a surface of the first material into a third material, wherein the third material has a lower refractive index than the second material, and wherein first material and third material have the same refractive index.
2. The optical guide structure of claim 1 , wherein the second material has a dielectric constant less than 1.45.
3. The optical guide structure of claim 1 , wherein the second material comprises carbon doped silicon dioxides.
4. The optical guide structure of claim 1 , wherein the second material comprises fluorinated silica glass oxide.
5. The optical guide structure of claim 1 , wherein the trench forms a ring-shaped optical guide structure.
6. The optical guide structure of claim 1 , wherein the third material comprises a color filter array.
7. The optical guide structure of claim 1 , wherein the third material comprises a boron-phosphorous silicon glass material.
8. The optical guide structure of claim 1 , wherein the first and second materials are optically transparent.