Method of fabricating the electronic device
View Patent ↗A method of fabricating an electronic device includes selectively forming a glass layer on a ceramic substrate by printing, baking the glass layer, and forming a capacitor on the glass layer, the capacitor including metal electrodes and a dielectric layer interposed between the metal electrodes.
1. A method of fabricating an electronic device, comprising:
selectively forming a glass layer on a substrate by printing;
baking the glass layer; and
forming a capacitor on the glass layer, the capacitor including metal electrodes and a dielectric layer interposed between the metal electrodes,
wherein forming a capacitor includes:
forming a lower electrode on an upper surface of the glass layer, the lower electrode being one of the metal electrodes;
forming the dielectric layer on said one of the metal electrodes; and
forming an upper electrode on the dielectric layer, the upper electrode being another one of the metal electrodes.
2. The method according to claim 1 , wherein selectively forming a glass layer does not form the glass layer in an area on the ceramic substrate in which the capacitor is not formed.
3. The method according to claim 1 , wherein tile ceramic substrate includes a through electrode, and selectively forming a glass layer does not form the glass layer on the through electrode.
4. The method according to claim 1 , wherein forming a lower electrode includes forming the lower electrode so that the lower electrode and the glass layer have an identical width and length and form flat side surfaces of the capacitor.
5. The method as claimed in claim 1 , further comprising baking the ceramic substrate, wherein baking the glass layer and baking the ceramic substrate are performed at the same time.
6. The method as claimed in claim 1 , further comprising baking the ceramic substrate, wherein baking the ceramic substrate is performed before baking the glass layer.
7. The method as claimed in claim 1 , wherein the ceramic substrate is formed of a ceramic multilayer substrate.
8. The method as claimed its claim 1 , wherein the glass layer includes an oxide that is a major component of the ceramic substrate.
9. The method as claimed in claim 1 , further comprising;
forming a first spiral coil on the ceramic substrate; and
forming a second spiral coil above the first spiral coil via a gap,
wherein the first spiral coil and the second spiral coil are formed in an area on the ceramic substrate in which the capacitor is not formed.