IP Library Granted Patent US 7,675,299
Granted Patent B2
US 7,675,299 · App. 12/396,659 · Granted Mar 9, 2010

Method and apparatus for making a determination relating to resistance of probes

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Quick Facts
Patent No.
US 7,675,299
App. No.
12/396,659
Granted
Mar 9, 2010
Kind
B2
Abstract

According to some embodiments, a method of determining a resistance of probes on a contactor device is disclosed. The contactor device can include a plurality of probes disposed to contact an electronic device to be tested. The method can include electrically connecting a pair of the probes to each other, and then forcing one of a voltage onto or a current through the pair of the probes. At a location on the contactor device, the other of a voltage across or a current through the pair of the probes can be sensed. A determination relating to a resistance of the probes can be determined from the values of the forced voltage or current and sensed other of the voltage or current.

Claims (41)

1. A method of determining the resistance of probes on a contactor device, the method comprising:

bringing the contactor device into contact with a shorting structure so that at least a pair of the probes are electrically connected to the shorting structure;

forcing a plurality of current pulses through the probes and the shorting structure to induce a corresponding plurality of voltage pulses across said probes;

determining a total current associated with the plurality of current pulses;

determining a total voltage associated with the plurality of voltage pulses; and

estimating a resistance of the probes from the total voltage and the total current to obtain an estimated resistance.

2. The method of claim 1 , wherein the shorting structure comprises interconnected power pins of a semiconductor device.

3. The method of claim 2 , further comprises supplying power to the semiconductor device through the probes using a power supply.

4. The method of claim 3 , wherein the supplying power and the forcing a plurality of current pulses are performed simultaneously.

5. The method of claim 4 , wherein the forcing a plurality of current pulses comprises outputting current pulses at a frequency greater than a loop frequency of the power supply.

6. The method of claim 1 , wherein the determining a total voltage comprises high pass filtering the voltage pulses.

7. The method of claim 1 , wherein the determining a total voltage comprises synchronously demodulating the voltage pulses.

8. The method of claim 1 , wherein the determining a total voltage comprises integrating the voltage pulses.

9. The method of claim 1 , further comprising:

repeating each of the forcing a plurality of curent pulses, the determining a total current, the determining a total voltage, and the estimating a resistance to obtain a plurality of resistance estimates; and

comparing the resistance estimates.

10. The method of claim 1 , further comprising outputting the estimated resistance to a tester electrically coupled to the contactor device.

11. The method of claim 1 , further comprising storing the estimated resistance in a memory on the contactor device.

12. The method of claim 1 , further comprising:

determining a total offset voltage when no current pulses are forced through the probes; and

wherein estimating a resistance comprises subtracting the total offset voltage from the total voltage.

13. The method of claim 1 , wherein the determining a total voltage comprises synchronously demodulating the plurality of voltage pulses using a synchronous demodulator and integrating the plurality of voltage pulses using an integrator.

14. The method of claim 1 , wherein the forcing the plurality of current pulses comprises driving the current in a same direction for each pulse.

15. A method of determining the resistance of probes on a contactor device, the method comprising:

pressing a pair of probes against a shorting structure;

outputting a series of current pulses over a time period so that the current pulses flow through the probes and the shorting structure and result in a series of voltage differences between the probes;

high pass filtering the series of voltage differences to produce a filtered voltage;

synchronously demodulating the filtered voltage to produce a rectified voltage;

integrating the rectified voltage for the time period to produce a total voltage;

determining a resistance estimate associated with the probes based on the total voltage.

16. The method of claim 15 , wherein the determining a resistance estimate comprises dividing the total voltage by a total current of the series of current pulses.

17. The method of claim 15 , further comprising:

determining an offset value by integrating over a second time period during which no current pulses are output; and

wherein determining a resistance estimate comprises subtracting the offset value from the total voltage.

18. The method of claim 15 , wherein the shorting structure comprises interconnected power pins of a semiconductor device.

19. The method of claim 18 , further comprising supplying power to the semiconductor device through the probes using a power supply.

20. The method of claim 19 , wherein the supplying power and the outputting a series of current pulses are performed simultaneously.

21. The method of claim 19 , wherein the outputting a plurality of current pulses comprises outputting the plurality of current pulses at a frequency greater than a loop frequency of the power supply.

22. The method of claim 15 , further comprising outputting the resistance estimate to a tester electrically coupled to the contactor device.

23. The method of claim 15 , further comprising storing the resistance estimate in a memory on the contactor device.

24. The method of claim 15 , wherein the current flow through the probes is in a same direction for each pulse.

Assignments (2)
RELEASE OF SECURITY INTEREST Recorded Aug 7, 2025
From: HSBC BANK USA, NATIONAL ASSOCIATION
To: FORMFACTOR, INC.
Reel/Frame 072853/0001 →
SECURITY INTEREST IN UNITED STATES PATENTS AND TRADEMARKS Recorded Jul 12, 2016
From: FORMFACTOR, INC.; ASTRIA SEMICONDUCTOR HOLDINGS, INC.; CASCADE MICROTECH, INC.; MICRO-PROBE INCORPORATED
To: HSBC BANK USA, NATIONAL ASSOCIATION
Reel/Frame 039184/0280 →