Imprint method and template for imprinting
An imprint method, in which pattern forming is performed by having a light curable material applied on a sample face of a substrate being a processing target hardened by being exposed to light in a state where the light curable material and a pattern formed surface of a template contact each other, the pattern formed surface having a concave-convex pattern formed thereon; wherein in one exposure performed with respect to a predetermined shot of the light curable material, an exposure amount at a light curable material on a first region which contacts a pattern formed region including the concave-convex pattern of the template is greater than an exposure amount at a light curable material on a second region which at least contacts a part of a pattern periphery region of the template, the pattern periphery region existing in a periphery of the pattern formed region of the template.
1. An imprint method comprising:
providing a light-curable material on a substrate;
contacting the light-curable material with a template, the template having a patterning surface including patterns to be transferred onto the light-curable material, the contact of the template with the light-curable material producing, in the light-curable material, a first region including a concave-convex pattern, a second region not including, a concave-convex pattern, and a third region not including a concave-convex pattern;
exposing, through the template, the first region with a first exposure amount of light energy, the second region with a second exposure amount of light energy, and the third region with a third exposure amount of light energy, the second amount being greater than the third amount and smaller than the first amount;
removing the template from the light-curable material;
after removing the template, contacting a portion of one of the second region or the third region with the template for a second time; and
exposing, through the template, the second region with a fourth exposure amount of light energy and the third region with a fifth exposure amount of light energy, the fourth amount being greater than the fifth amount;
wherein a shutter is arranged on a surface of the template opposite the patterning surface at a position corresponding to the second and third regions.
2. The imprint method according to claim 1 , further comprising controlling the exposure amounts at the light-curable material with the shutter.
3. The imprint method according to claim 2 , wherein
controlling the exposure amounts at the light-curable material comprises operating a shutter during the exposure.
4. The imprint method according to claim 3 , wherein
controlling the second exposure amount and the third exposure amount comprises operating the shutter during the exposure.
5. The imprint method according to claim 1 , wherein
controlling the exposure amounts comprises producing a first transmittance of the template corresponding to at least one of the second region or the third region and a second transmittance of the template corresponding to at least a concave pattern in the concave-convex pattern of the first region, the first transmittance being less than the second transmittance.
6. The imprint method according to claim 5 ,
comprising arranging a transmissive film on the template for reducing light transmittance of the template, the transmissive film being arranged at at least one of the second region or the third region.
7. The imprint method according to claim 1 , wherein the light-curable material is the first light-curable material, the method further comprising:
providing a second light-curable material adjacent to the first light-curable material; and
contacting the second light-curable material and the portion of one of the second region or the third region with the template.
8. The imprint method according to claim 7 , wherein
controlling the exposure amounts comprises producing a first transmittance of the template corresponding to at least one of the second region or the third region and a second transmittance of the template corresponding to at least a concave pattern in the concave-convex pattern of the first region, the first transmittance being less than the second transmittance.
9. The imprint method according to claim 8 , comprising:
arranging a transmissive film on the template for reducing light transmittance of the template, the transmissive film being arranged at at least one of the second region or the third region.
10. The imprint method according to claim 1 , further comprising
exposing an entire surface of the substrate after exposing all of the shots on the substrate through the template.