Low temperature probing apparatus
A low temperature probing apparatus comprises a housing, a device holder positioned in the housing and configured to receive at least one semiconductor device under test, a platen positioned on the housing, at least one hydraulic stage positioned on the platen and configured to retain at least one probe, a cover positioned on the platen and configured to form an isolation chamber with the hydraulic stage and the device holder positioned therein, and a hydraulic controller configured to control the movement of the hydraulic stage.
1. A low temperature probing apparatus, comprising:
a housing;
a device holder positioned in the housing and configured to receive at least one semiconductor device under test;
a platen positioned on the housing;
at least one hydraulic stage positioned on the platen and configured to retain at least one probe;
a cover positioned on the platen and configured to form an isolation chamber with the hydraulic stage and the device holder positioned therein; and
a hydraulic controller outside the housing and configured to control the movement of the hydraulic stage.
2. The low temperature probing apparatus of claim 1 , wherein the cover include a transparent window.
3. The low temperature probing apparatus of claim 2 , further comprising an image-capturing device configured to capture an alignment image of the semiconductor device and the probe through the transparent window.
4. The low temperature probing apparatus of claim 2 , wherein the transparent window includes glass or plastic.
5. The low temperature probing apparatus of claim 1 , wherein the hydraulic stage includes a stationary member positioned on the platen and a movable member configured to retain the probe.
6. The low temperature probing apparatus of claim 5 , wherein the movable member includes a carrier configured to retain the probe.
7. The low temperature probing apparatus of claim 1 , wherein the probe is connected to a tester through an electrical connector positioned on the cover.
8. The low temperature probing apparatus of claim 1 , wherein the probe is connected to a tester through a sleeve positioned on the cover.
9. The low temperature probing apparatus of claim 1 , wherein the hydraulic controller is configured to control the movement of the hydraulic stage by at least one hydraulic tube.
10. The low temperature probing apparatus of claim 9 , wherein the hydraulic tube connects the hydraulic controller to the hydraulic stage through a sleeve positioned on the cover.
11. The low temperature probing apparatus of claim 9 , wherein the hydraulic tube connects the hydraulic controller to the hydraulic stage through a hydraulic connector positioned on the cover.
12. The low temperature probing apparatus of claim 1 , wherein the hydraulic controller is positioned on the cover.
13. A low temperature probing apparatus, comprising:
a housing;
a device holder positioned in the housing and configured to receive at least one semiconductor device under test;
a platen positioned on the housing;
at least one hydraulic stage positioned on the platen and configured to retain a probe card;
a cover positioned on the platen and configured to form an isolation chamber with the hydraulic stage and the device holder positioned therein; and
a hydraulic controller configured to control the movement of the hydraulic stage.
14. The low temperature probing apparatus of claim 13 , wherein the cover include a transparent window.
15. The low temperature probing apparatus of claim 14 , further comprising an image-capturing device configured to capture an alignment image of the semiconductor device and a probe of the probe card through the transparent window.
16. The low temperature probing apparatus of claim 14 , wherein the transparent window includes glass or plastic.
17. The low temperature probing apparatus of claim 13 , wherein the hydraulic stage includes a stationary member positioned on the platen and a movable member configured to retain the probe card.
18. The low temperature probing apparatus of claim 17 , wherein the movable member includes a carrier configured to retain the probe card.
19. The low temperature probing apparatus of claim 13 , wherein the probe card is connected to a tester through an electrical connector positioned on the cover.
20. The low temperature probing apparatus of claim 13 , wherein the probe card is connected to a tester through a sleeve positioned on the cover.
21. The low temperature probing apparatus of claim 13 , wherein the hydraulic controller is configured to control the movement of the hydraulic stage by at least one hydraulic tube.
22. The low temperature probing apparatus of claim 21 , wherein the hydraulic tube connects the hydraulic controller to the hydraulic stage through the sleeve positioned on the cover.
23. The low temperature probing apparatus of claim 21 , wherein the hydraulic tube connects the hydraulic controller to the hydraulic stage through a hydraulic connector positioned on the cover.
24. The low temperature probing apparatus of claim 13 , wherein the hydraulic controller is positioned on the cover.
25. The low temperature probing apparatus of claim 13 , wherein the probe card includes a substrate and at least one probe positioned on the substrate.