Semiconductor wafer with a heteroepitaxial layer and a method for producing the wafer
A multilayer semiconductor wafer has a substrate wafer having a first side and a second side; a fully or partially relaxed heteroepitaxial layer deposited on the first side of the substrate wafer; and a stress compensating layer deposited on the second side of the substrate wafer. The multilayer semiconductor wafer is produced by a method including depositing on a first side of a substrate a fully or partially relaxed heteroepitaxial layer at a deposition temperature; and at the same temperature or before significantly cooling the wafer from the deposition temperature, providing a stress compensating layer on a second side of the substrate.
1. A multilayer semiconductor wafer comprising
a silicon substrate wafer having a first side and a second side;
a fully or partially relaxed graded SiGe heteroepitaxial layer deposited on the first side of the substrate wafer and a constant composition SiGe layer on top of the graded SiGe heteroepitaxial layer; and
a constant composition SiGe layer deposited on the second side of the substrate wafer acting as a stress compensating layer.
2. The wafer of claim 1 , wherein the concentration of Ge in the constant composition SiGe layer acting as the stress compensating layer is from 10 to 80%.