Laser irradiation apparatus and method of fabricating organic light emitting display using the same
A laser irradiation apparatus and method of fabricating an organic light emitting display using the same are provided. The laser irradiation apparatus includes: a laser generator; a mask having means for changing a propagation path of a laser beam; and a projection lens. The method of fabricating an organic light emitting display includes: irradiating a laser beam on an edge of an irradiated region of a donor substrate using the laser irradiation apparatus with high intensity to form an organic layer pattern on a substrate. The laser beam having low intensity can perform a transfer process to improve laser beam efficiency. In addition, it is possible to reduce damage on the organic layer, and improve quality of the transferred organic layer pattern.
1. A method of fabricating an organic light emitting display, comprising:
laminating a donor substrate on a substrate comprising a pixel electrode; and
using a laser irradiation apparatus to irradiate a region of the donor substrate, to form an organic layer pattern on the substrate,
wherein the laser irradiation apparatus comprises a mask comprising planar portions to transmit the laser beam, and a projection to increase the intensity of an edge portion of the laser beam, by changing a propagation path of the laser beam, such that the edge portion of the laser beam has a higher intensity than a central portion of the laser beam.
2. The method according to claim 1 , wherein the laser irradiation apparatus further comprises
a laser generator disposed above the mask and to generate the laser beam; and
a projection lens located under the mask.
3. The method according to claim 2 , wherein the projection is machined to have a lens shape.
4. The method according to claim 3 , wherein the lens has a convex lens shape.
5. The method according to claim 2 , wherein the mask consists of a transparent material.
6. The method according to claim 5 , wherein the transparent material is any one of a glass and a plastic.
7. The method according to claim 1 , wherein the projection is a lens.
8. The method according to claim 7 , wherein the lens is a convex lens.
9. The method according to claim 8 , wherein the convex lens is formed at any one of a lower surface and an upper surface of the mask.
10. The method according to claim 8 , wherein the convex lens is formed at lower and upper surfaces of the mask.
11. The method according to claim 1 , wherein the laser irradiation apparatus radiates the laser beam in a step-and-step manner.
12. The method according to claim 1 , wherein the irradiation of the donor substrate is performed in an N 2 atmosphere.
13. The method according to claim 1 , wherein the irradiation of the donor substrate is performed in a vacuum atmosphere.
14. The method according to claim 1 , wherein the organic layer pattern is a single layer or a multi-layer of at least two layers selected from an emission layer, a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer.