METHOD FOR MANUFACTURING MICROCRYSTALLINE SILICON SOLAR CELL
A method for manufacturing a microcrystalline silicon solar cell comprises forming a zinc oxide transparent electrode with a textured surface on an insulation substrate by chemical vapor deposition, etching the zinc oxide transparent electrode with acid water solution and depositing a microcrystalline silicon thin film on the zinc oxide transparent electrode with the textured surface.
1 . A method for manufacturing a microcrystalline silicon solar cell, comprising the steps of:
forming a zinc oxide transparent electrode with a textured surface on an insulation substrate by chemical vapor deposition;
etching the zinc oxide transparent electrode with acid water solution; and
depositing a microcrystalline silicon thin film on the zinc oxide transparent electrode with the textured surface.
2 . The method according to claim 1 , further comprising dry-cleaning or wet-cleaning the substrate after step after etching.
3 . The method according to claim 1 , wherein the zinc oxide transparent electrode has a thickness ranging from 2 μm to 2.5 μm.
4 . The method according to claim 1 , wherein the acid water solution has a concentration ranging from 0.5% to 5%.
5 . The method according to claim 1 , wherein the acid water solution contains at least one of hydrochloric acid (HCl), phosphoric acid (HPO 3 ), nitric acid (HNO 3 ), and acetic acid (CH 3 COOH).
6 . The method according to claim 1 , wherein the substrate on which the transparent electrode is formed is put in the acid water solution for 5 seconds to 20 seconds.
7 . The method according to claim 1 , wherein the textured surface has a V-shaped valley shape.