Semiconductor light emitting device and method of manufacturing the same
View Patent ↗Provided are a semiconductor light emitting device having a nano pattern and a method of manufacturing the semiconductor light emitting device. The semiconductor light emitting device includes: a semiconductor layer comprising a plurality of nano patterns, wherein the plurality of nano patterns are formed inside the semiconductor layer; and an active layer formed on the semiconductor layer. The optical output efficiency is increased and inner defects of the semiconductor light emitting device are reduced.
1. A method of manufacturing a semiconductor light emitting device having a nano pattern, the method comprising:
(a) forming a first semiconductor layer on a substrate;
(b) forming etch pits in defect regions of the first semiconductor layer by wet-etching an upper surface of the first semiconductor;
(c) forming a nano pattern by filling the etch pits of the first semiconductor layer with light-transmissive material; and
sequentially forming a second semiconductor layer, an active layer, and a third semiconductor layer on the first semiconductor layer,
wherein step (c) comprises:
coating a light-transmissive material over the first semiconductor layer to fill the etch pits; and
leveling the first semiconductor layer such that a surface of the first semiconductor layer is exposed and the exposed surface of the first semiconductor layer is coplanar with the filled light transmissive material.
2. The method of claim 1 , wherein (b) comprises etching using H 3 PO 4 or KOH.
3. The method of claim 1 , wherein the light-transmissive material is a transparent insulator and is formed of at least one selected from the group consisting of SiO 2 , SiN x , Al 2 O 3 , HfO, TiO 2 , and ZrO.
4. The method of claim 1 , wherein the light-transmissive material is a transparent conductor and is formed of ZnO or of an In oxide containing at least one additive selected from the group consisting of Mg, Ag, Zn, Sc, Hf, Zr, Te, Se, Ta, W, Nb, Cu, Si, Ni, Co, Mo, Cr, Mn, Hg, Pr, and La.
5. The method of claim 1 , further comprising heating after the coating with the light-transmissive material.