Flow control valve

1. A flow control valve that is arranged in a flow channel where fluid flows and that expels the fluid into an outflow channel as being a downstream flow channel by controlling a flow of the fluid from an inflow channel as being an upstream flow channel, comprising:

a valve seat member having a valve seated surface; and

a valve body member having a seating surface that is seated on the valve seated surface;

wherein multiple inflow orifices are provided on the valve seated surface and multiple outflow orifices are formed on a surface selected from the group consisting of the valve seated surface and the seating surface, and the inflow orifices and the outflow orifices are formed so as not to overlap each other in a state in which the seating surface is seated on the valve seated surface;

wherein an inside inflow channel is formed inside a first member where the inflow orifices are formed and an inside outflow channel comprising a downstream-side inside outflow channel is formed inside a second member where the outflow orifices are formed; and

wherein the inside inflow channel is in communication with the inflow channel and a plurality of the inflow orifices, and the downstream-side inside outflow channel is in communication with the outflow channel and a plurality of the outflow orifices via a plurality of upstream-side inside outflow channels;

wherein the inflow orifices are formed on multiple annular concave grooves that are formed on a surface selected from the group consisting of the valve seated surface and the seating surface;

wherein the outflow orifices are formed on multiple annular concave grooves that are formed on a surface selected from the group consisting of the valve seated surface and the seating surface and that are different from the concave grooves where the inflow orifices are formed; and

wherein a combined opening area of the inflow orifices formed on an outermost side concave groove of the multiple annular concave grooves containing the inflow orifices is larger than a combined opening area of the inflow orifices formed on another of the multiple annular concave grooves containing the inflow orifices.

2. The flow control valve described in claim 1 ,

wherein the inflow orifices and the outflow orifices are formed on the valve seated surface, and the first member where the inside inflow channel is formed is the valve seat member, and the second member where the inside outflow channel is formed is also the valve seat member; and

wherein the inflow orifices and the outflow orifices are formed on bottom surfaces of the multiple annular concave grooves that are formed on the valve seated surface, and the inflow orifices are formed on a first part of the bottom surfaces of the concave grooves that is different from a second part of the bottom surfaces of the concave grooves where the outflow orifices are formed.

3. The flow control valve described in claim 2 ,

wherein the multiple concave grooves where the inflow orifices are formed and the multiple concave grooves where the outflow orifices are formed are generally concentrically formed concave grooves; and

wherein the multiple concave grooves where the inflow orifices are formed and the multiple concave grooves where the outflow orifices are formed are alternately formed.

4. The flow control valve described in claim 1 ,

wherein the inflow orifices and the outflow orifices are arranged radially.

5. A flow control valve that is arranged in a flow channel where fluid flows and that expels the fluid into an outflow channel as being a downstream flow channel by controlling a flow of the fluid from an inflow channel as being an upstream flow channel, comprising:

a valve seat member having a valve seated surface; and

a valve body member having a seating surface that is seated on the valve seated surface, wherein

multiple inflow orifices are provided on a surface selected from the group consisting of the valve seated surface and the seating surface, and multiple outflow orifices are formed on a surface selected from the group consisting of the valve seated surface and the seating surface; and

wherein the inflow orifices and the outflow orifices are formed so as not to overlap each other in a state that the seating surface is seated on the valve seated surface;

wherein an inside inflow channel is formed inside a member where the inflow orifices are formed, and an inside outflow channel comprising a downstream-side inside outflow channel is formed inside a member where the outflow orifices are formed; and

wherein the inside inflow channel is in communication with the inflow channel and a plurality of the inflow orifices and the downstream-side inside outflow channel is in communication with the outflow channel and a plurality of the outflow orifices via a plurality of upstream-side inside outflow channels;

wherein the inflow orifices and the outflow orifices are arranged on bottom surfaces of concave grooves formed on the valve seated surface or the seating surface; and

wherein a combined opening area of the inflow orifices formed on an outermost side concave groove of the concave grooves containing the inflow orifices is larger than a combined opening area of the inflow orifices formed on another of the concave grooves containing the inflow orifices.

6. A mass flow controller, comprising:

a flow sensor;

a flow control valve; and

a control part that controls a valve open degree of the flow control valve based on a measured flow value output by the flow sensor and a set flow value as being a target flow;

wherein the flow control valve is arranged in a flow channel where fluid flows and that expels the fluid into an outflow channel as being a downstream flow channel by controlling a flow of the fluid from an inflow channel as being an upstream flow channel, the flow control valve including:

a valve seat member having a valve seated surface; and

a valve body member having a seating surface that is seated on the valve seated surface;

wherein multiple inflow orifices are provided on the valve seated surface and multiple outflow orifices are formed on a surface selected from the group consisting of the valve seated surface and the seating surface, and the inflow orifices and the outflow orifices are formed so as not to overlap each other in a state in which the seating surface is seated on the valve seated surface;

wherein an inside inflow channel is formed inside a first member where the inflow orifices are formed, and an inside outflow channel comprising a downstream-side inside outflow channel is formed inside a second member where the outflow orifices are formed; and

wherein the inside inflow channel is in communication with the inflow channel and a plurality of the inflow orifices, and the downstream-side inside outflow channel is in communication with the outflow channel and a plurality of the outflow orifices via a plurality of upstream-side inside outflow channels;

wherein the inflow orifices and the outflow orifices are formed on multiple annular concave grooves that are formed on a surface of the valve seated surface or the seating surface; and

wherein a combined opening area of the inflow orifices formed on an outermost side concave groove of the multiple annular concave grooves containing the inflow orifices is larger than a combined opening area of the inflow orifices formed on another of the multiple annular concave grooves containing the inflow orifices.

7. The mass flow controller described in claim 6 , further comprising:

wherein the inflow orifices and the outflow orifices are formed on the valve seated surface, and the first member where the inside inflow channel is formed is the valve seat member, and the second member where the inside outflow channel is formed is also the valve seat member; and

wherein the inflow orifices and the outflow orifices are formed on bottom surfaces of the multiple annular concave grooves that are formed on the valve seated surface, and the inflow orifices are formed on a first part of the bottom surfaces of the concave grooves that is different from a second part of the bottom surfaces of the concave grooves where the outflow orifices are formed.

8. The mass flow controller described in claim 7 ,

wherein the multiple concave grooves where the inflow orifices are formed and the multiple concave grooves where the outflow orifices are formed are generally concentrically formed concave grooves; and

wherein the multiple concave grooves where the inflow orifices are formed and the multiple concave grooves where the outflow orifices are formed are alternately formed.

9. The mass flow controller described in claim 6 ,

wherein the inflow orifices and the outflow orifices are arranged radially.

10. The flow control valve described in claim 5 ,

wherein the inflow orifices and the outflow orifices are formed on the valve seated surface and the member where the inside inflow channel is formed and the member where the inside outflow channel is formed is the same valve seat member; and

wherein the inflow orifices and the outflow orifices are formed on bottom surfaces of the concave grooves that are formed on the valve seated surface, and the inflow orifices are formed on a first part of the bottom surfaces of the concave grooves that is different from a second part of the bottom surfaces of the concave grooves where the outflow orifices are formed.

11. The flow control valve described in claim 1 ,

wherein the first member where the inside inflow channel is formed is the valve body member and the second member where the inside outflow channel is formed is the valve seat member.

12. The flow control valve described in claim 5 ,

wherein the first member where the inside inflow channel is formed is the valve body member and the second member where the inside outflow channel is formed is the valve seat member.

13. The mass flow controller described in claim 6 ,

wherein the first member where the inside inflow channel is formed is the valve body member and the second member where the inside outflow channel is formed is the valve seat member.