Forming an intermediate electrode between an ovonic threshold switch and a chalcogenide memory element
View Patent ↗An intermediate electrode between an ovonic threshold switch and a memory element may be formed in the same pore with the memory element. This may have many advantages including, in some embodiments, reducing leakage.
1. A phase change memory comprising:
a chalcogenide memory element including a pore, a first chalcogenide in said pore, and an intermediate electrode in said pore and over said first chalcogenide; and
an ovonic threshold switch over said pore and said memory element.
2. The memory of claim 1 including a dielectric, said pore formed in said dielectric.
3. The memory of claim 2 wherein said dielectric and said intermediate electrode include upper surfaces that are coplanar.
4. The memory of claim 1 wherein said intermediate electrode is entirely within the pore.
5. The memory of claim 4 including a sidewall spacer in said pore.
6. The memory of claim 5 wherein said chalcogenide extends over the top of said sidewall spacer.
7. The memory of claim 6 including a conductor in said pore under said first chalcogenide.
8. The memory of claim 1 wherein said ovonic threshold switch includes a second chalcogenide and a top electrode over said second chalcogenide.
9. The memory of claim 8 wherein said second chalcogenide overlaps said intermediate electrode.
10. The memory of claim 9 wherein said ovonic threshold switch covers said intermediate electrode and extends beyond said intermediate electrode such that said intermediate electrode and said switch have edges that are offset.
11. A system comprising:
a phase change memory including a chalcogenide memory element having a pore, a first chalcogenide in said pore, and an intermediate electrode in said pore and over said first chalcogenide and an ovonic threshold switch over said pore and said intermediate electrode; and
a processor coupled to said phase change memory.
12. The system of claim 11 including a dielectric, said pore formed in said dielectric.
13. The system of claim 12 wherein said dielectric and said intermediate electrode include upper surfaces that are coplanar.
14. The system of claim 11 wherein said intermediate electrode is entirely within said pore.
15. The system of claim 11 wherein said ovonic threshold switch includes a second chalcogenide and a top electrode over said second chalcogenide, wherein said second chalcogenide overlaps said intermediate electrode.