Large area roll-to-roll imprint lithography
View Patent ↗Droplets of polymerizable material may be patterned on a film sheet. The droplets of polymerizable material may be dispensed on the film sheet. A pre-determined force may be applied to an imprint lithography template such that localized trapping of the droplets of the polymerizable material on the film sheet is minimized and the droplets coalesce to form a continuous layer. The polymerizable material may be solidified to form a patterned layer having a residual layer and at least one feature.
1. A method for patterning polymerizable material on a film sheet, comprising:
dispensing a plurality of droplets of polymerizable material on the film sheet;
providing a tension to the film sheet prior to dispensing the droplets;
applying a force to a first imprint lithography template such that the first imprint lithography template contacts the droplets of polymerizable material on the film sheet,
wherein the applied template force and the provided film sheet tension are pre-determined to minimize localized trapping of the droplets of the polymerizable material on the film sheet such that droplets coalesce to form a continuous layer during contact with the first imprint lithography template; and,
solidifying the polymerizable material to form a patterned layer having a residual layer and at least one feature;
wherein the first imprint lithography template includes a plurality of molds that include a first subset of molds complimentary to a second subset of molds.
2. The method of claim 1 , further comprising adjusting a surface contact angle of the polymerizable material prior to dispensing the droplets such that the droplets when dispensed on the film sheet coalesce to form the continuous layer.
3. The method of claim 1 , further comprising adjusting viscosity of the polymerizable material prior to dispensing the droplets such that the droplets when dispensed on the film sheet coalesce to form the continuous layer.
4. The method of claim 1 , further comprising adjusting size of the droplets of the polymerizable material prior to dispensing the droplets such that the droplets when dispensed on the film sheet coalesce to form the continuous layer.
5. The method of claim 1 , further comprising adjusting the placement of the polymerizable material prior to dispensing the droplets such that the droplets when dispensed on the film sheet coalesce to form the continuous layer.
6. The method of claim 1 , wherein the film sheet is coupled to a first roller and a second roller, the first roller and the second roller positioned substantially parallel relative to one another such that the first portion of the film sheet is substantially parallel to the first imprint lithography template.
7. A method for patterning polymerizable material on a film sheet, comprising:
dispensing a plurality of droplets of polymerizable material on the film sheet;
providing a tension to the film sheet prior to dispensing the droplets;
applying a force to a first imprint lithography template such that the first imprint lithography template contacts the droplets of polymerizable material on the film sheet,
wherein the first imprint lithography template includes a plurality of molds that are substantially similar,
wherein the applied template force and the provided film sheet tension are pre-determined to minimize localized trapping of the droplets of the polymerizable material on the film sheet such that droplets coalesce to form a continuous layer during contact with the first imprint lithography template; and,
solidifying the polymerizable material to form a patterned layer having a residual layer and at least one feature;
the method further comprising a chucking system adjacent to the first imprint lithography template, wherein the chucking system is in superimposition with each mold to define a plurality of chambers.
8. The method of claim 7 , further comprising a pump system in fluid communication with each chamber, the pump system capable of providing each chamber in a vacuum state such that portions of the first imprint lithography template bow away from the film sheet and portions of the template bow towards the film sheet.
9. The method of claim 7 , further comprising a pump system in fluid communication with each chamber, the pump system capable of providing each chamber in a pressure state.
10. A method for patterning polymerizable material on a film sheet, comprising:
dispensing a plurality of droplets of polymerizable material on the film sheet;
providing a tension to the film sheet prior to dispensing the droplets;
applying a force to a first imprint lithography template such that the first imprint lithography template contacts the droplets of polymerizable material on the film sheet,
wherein the applied template force and the provided film sheet tension are pre-determined to minimize localized trapping of the droplets of the polymerizable material on the film sheet such that droplets coalesce to form a continuous layer during contact with the first imprint lithography template;
solidifying the polymerizable material to form a patterned layer having a residual layer and at least one feature; and
patterning a second patterned layer on the patterned layer with a second imprint lithography template, wherein the second imprint lithography template is positioned offset from the polymerizable material during formation of the patterned layer with the first imprint lithography template and the first imprint lithography template is positioned offset from the patterned layer during patterning with the second imprint lithography template.
11. The method of claim 10 , wherein the first imprint lithography template includes a plurality of molds having patterning features extending towards the film sheet and a plurality of portions substantially absent of molds with patterning features.
12. The method of claim 10 , wherein the second imprint lithography template is a compliment of the first imprint lithography template.
13. The method of claim 10 , wherein a force applied to the second imprint lithography template to pattern the patterned layer may be determined to minimize undulations in the film sheet such that film sheet is substantially flat.
14. The method of claim 10 , wherein the film sheet is coupled to a first roller and a second roller, further comprising:
recapturing, by the second roller, the film sheet having the patterned layer and the second patterned layer; and,
patterning a film on the second patterned layer prior to recapturing, the film protecting the second patterned layer from damage during recapturing of the film sheet.