Method for manufacture of magnetic recording medium and magnetic recording and reproduction device
View Patent ↗A method for manufacturing a magnetic recording medium includes the steps of depositing a magnetic layer on at least one of surfaces of a nonmagnetic substrate and injecting atoms partially in the magnetic layer, thereby demagnetizing parts having admitted the injected atoms or imparting amorphousness thereto, to form a magnetically separated magnetic recording pattern. The step of injecting includes the steps of applying resist to the at least one surface subsequent to the step of depositing, partially decreasing a thickness of the resist and irradiating a surface of the resist with atoms, thereby inducing partial injection of the atoms to the magnetic layer through portions of the resist decreased in thickness.
1. A method for manufacturing a magnetic recording medium, comprising the steps of:
depositing a magnetic layer on at least one of surfaces of a nonmagnetic substrate; and
injecting atoms partially in the magnetic layer, thereby demagnetizing parts having admitted the injected atoms or imparting amorphousness thereto, to form a magnetically separated magnetic recording pattern;
wherein the step of injecting includes the steps of applying resist to the at least one surface subsequent to the step of depositing the magnetic layer, partially decreasing a thickness of the resist and irradiating a surface of the resist with atoms, thereby inducing partial injection of the atoms to the magnetic layer through portions of the resist decreased in thickness.
2. A method for manufacturing a magnetic recording medium according to claim 1 , wherein the step for partially decreasing is accomplished by transferring to the surface of the resist a convexo-concave shape formed on a surface of a stamp.
3. A method for manufacturing a magnetic recording medium according to claim 1 , wherein the step for partially decreasing is accomplished by partially etching the surface of the resist.
4. A method for manufacturing a magnetic recording medium according to claim 1 , wherein the portions of the resist decreased in thickness have a thickness in a range of 1 nm to 150 nm.
5. A method for manufacturing a magnetic recording medium according to claim 1 , wherein the portions of the resist decreased in thickness have a width of 100 nm or less and other portions of the resist have a width of 200 nm or less.
6. A method for manufacturing a magnetic recording medium according to claim 1 , further comprises the step of forming a protective layer on the magnetic layer before the step of applying resist, wherein the resist is applied onto the protective layer.
7. A method for manufacturing a magnetic recording medium according to claim 1 , wherein the atoms injected are those of at least one element selected from the group consisting of B, P, Si, F, N, H, C, In, Bi, Kr, Ar, Xe, W, As, Ge, Mo and Sn.
8. A method for manufacturing a magnetic recording medium according to claim 7 , wherein the atoms injected are those of the Kr or Si.
9. A method for manufacturing a magnetic recording medium according to claim 1 , wherein the magnetic layer has a thickness in a range of 3 to 20 nm.