Apparatus for loading and unloading semiconductor substrate platelets
The goal of the present invention is to provide an apparatus capable of cooperation with at least one piece of wafer processing equipment. The apparatus is connected to a first equipment via a first opening, to a wafer transport case via a second opening and to a second piece of equipment via a third opening. The apparatus is capable of removing a basket of parallel stacked trays of wafers from a wafer transport case. The apparatus is capable of placing and supporting the wafers in order to move them to the first equipment through the second opening and to the second piece of equipment through the third opening.
1. Apparatus capable of cooperation with at least one wafer processing equipment, and capable of being placed under vacuum, said apparatus comprising:
a first opening comprising leak proof means for connection to a first equipment chosen from a transfer lock and a wafer processing chamber which are kept under vacuum;
a second opening comprising leak proof means of connection to a wafer transport case containing a basket, comprising a series of parallel stacked trays adapted to store a wafer each, the basket being able to be transported within the apparatus while both the apparatus and the wafer transport case are kept under vacuum;
means for moving the basket from and to the wafer transport case while under vacuum;
means for immobilizing the trays;
a third opening comprising leak proof means for connection to a second piece of equipment chosen from an EFEM module and a second wafer processing chamber; and
means for placement and support of a wafer in a given position, capable of working together with the means for moving the basket and the means for immobilizing the trays to enable the passage of the wafer through either the first or the third opening.
2. Apparatus according to claim 1 , further comprising door activating means to open and close doors respectively blocking each opening so that the apparatus may be kept under vacuum when the doors are closed.
3. Apparatus according to claim 1 , further comprising means for maintaining a vacuum in the apparatus and the first equipment when the first opening is coupled to the first equipment.
4. Apparatus according to claim 1 , wherein the means for immobilizing the trays comprise locking pins acting together with means for activating said pins.
5. Apparatus according to claim 4 , wherein said locking pins are fitted with a notch engaging with a tray.
6. Apparatus according to claim 1 , wherein the means for placement and support of a wafer comprises the combination of placement arms, acting together with means for activating the said arms, and of wedges arranged between a tray and the wafer.
7. Apparatus according to claim 1 , further comprising means for maintaining a vacuum in the apparatus when in the area where the second opening is coupled to the wafer transport case.
8. System for wafer processing comprising;
a wafer processing chamber communicating with a first transfer chamber; and
an apparatus capable of cooperation with at least one wafer processing equipment, and capable of being placed under vacuum, said apparatus comprising:
a first opening comprising leak proof means for connection to a first equipment chosen from a transfer lock and the wafer processing chamber which are kept under vacuum;
a second opening comprising leak proof means of connection to a wafer transport case containing a basket, comprising a series of parallel stacked trays adapted to store a wafer each, the basket being able to be transported within the apparatus while both the apparatus and the wafer transport case are kept under vacuum;
means for moving the basket from and to the wafer transport case while under vacuum;
means for immobilizing the trays;
a third opening comprising leak proof means for connection to a second piece of equipment chosen from an EFEM module and a second wafer processing chamber; and
means for placement and support of a wafer in a given position, capable of working together with the means for moving the basket and the means for immobilizing the trays to enable the passage of the wafer through either the first or the third opening; said apparatus communicating with the first transfer chamber, with the EFEM module or the second transfer chamber, and with
the wafer transport case.
9. System for wafer processing according to claim 8 , further comprising:
a second apparatus capable of cooperation with at least one wafer processing equipment connected between the first transfer chamber and the EFEM.