Electrical fuse and semiconductor device
View Patent ↗An electrical fuse comprises: an interconnect to be cut; and a first terminal and a second terminal which are respectively provided at both ends of the interconnect to be cut. The interconnect to be cut comprises: a first orientation film which contains copper as a main component and is oriented in a (111) plane; and a second orientation film which contains copper as a main component and is oriented in a (511) plane. The second orientation film is provided inside the first orientation film over a width direction of the first orientation film, which is perpendicular to a direction from the first terminal toward the second terminal, so as to partition the first orientation film. Accordingly, it becomes possible to securely cut the electrical fuse whose constituent material is copper, and moreover, to maintain a satisfactory cut state of the electrical fuse after the cutting.
1. An electrical fuse, comprising:
an interconnect to be cut; and
a first terminal and a second terminal which are respectively provided at both ends of the interconnect to be cut,
the interconnect to be cut comprising:
a first orientation film which contains copper as a main component and is oriented in a (111) plane; and
a second orientation film which contains copper as a main component and is oriented in a (511) plane,
the second orientation film being provided inside the first orientation film over a width direction of the first orientation film, which is perpendicular to a direction from the first terminal toward the second terminal, so as to partition the first orientation film.
2. An electrical fuse according to claim 1 , wherein:
the first terminal and the second terminal are each formed larger in width than the interconnect to be cut;
the first terminal and the second terminal mainly include the first orientation film; and
a content of the second orientation film within the interconnect to be cut with respect to the first orientation film is larger than a content of the second orientation film within the first terminal and the second terminal with respect to the first orientation film.
3. An electrical fuse according to claim 1 , wherein the second orientation film contains a different element other than copper.
4. An electrical fuse according to claim 1 , wherein the first orientation film contains a different element other than copper.
5. A semiconductor device, comprising:
a substrate; and
an electrical fuse comprising:
an interconnect to be cut formed on the substrate; and
a first terminal and a second terminal which are respectively provided at both ends of the interconnect to be cut,
the interconnect to be cut comprising:
a first orientation film which contains copper as a main component and is oriented in a (111) plane; and
a second orientation film which contains copper as a main component and is oriented in a (511) plane,
the second orientation film being provided inside the first orientation film over a width direction of the first orientation film, which is perpendicular to a direction from the first terminal toward the second terminal, so as to partition the first orientation film.
6. A semiconductor device according to claim 5 , wherein:
the first terminal and the second terminal are each formed larger in width than the interconnect to be cut;
the first terminal and the second terminal mainly include the first orientation film; and
a content of the second orientation film within the interconnect to be cut with respect to the first orientation film is larger than a content of the second orientation film within the first terminal and the second terminal with respect to the first orientation film.
7. A semiconductor device according to claim 5 , wherein the second orientation film contains a different element other than copper.
8. A semiconductor device according to claim 5 , wherein the first orientation film contains a different element other than copper.