Cleaning composition comprising a chelant and quaternary ammonium hydroxide mixture
View Patent ↗The invention relates to compositions and methods for cleaning integrated circuit substrates. The compositions are in the form of an aqueous solution and include a quaternary ammonium hydroxide compound and a chelating compound. The chelating compound includes either boric acid or at least one N-substituted aminocarboxylate selected from the group consisting of N-bis(2-hydroxyethyl)glycine(bicine), N-tris(hydroxymethyl)methyl glycine (tricine) and mixtures thereof, and can optionally include glycine, Iminodiacetic acid (IDA), Nitrilo trizacetic acid (NTA), Ethylenediammine Tetraacetic acid (EDTA), or mixtures thereof.
1. A cleaning composition in the form of an aqueous solution comprising:
a) between about 0.1% and about 5.0% of tris (2-hydroxyethyl) methylammonium hydroxide (THEMAH);
b) between about 0.1% and about 5.0% of N-tris(hydroxymethyl)methyl glycine (tricine);
c) between about 0.1% and about 5.0% of iminodiacetic acid; and
d) between about 85.0% and about 99.7% of water.
2. A cleaning composition in the form of an aqueous solution comprising:
a) between about 0.1% and about 5.0% of tris (2-hydroxyethyl) methylammonium hydroxide (THEMAH);
b) between about 0.1% and about 5.0% of N-bis(2-hydroxyethyl)glycine (bicine);
c) between about 0.1% and about 5.0% of iminodiacetic acid; and
d) between about 85.0% and about 99.7% of water.
3. The cleaning composition of claim 1 or claim 2 further comprising a pH adjuster selected from the group consisting of organic acids, alkanolamines, inorganic acids and mixtures thereof.
4. The cleaning composition of claim 3 where the pH is between about 4 and about 7.
5. The cleaning composition of claim 3 or claim 4 further comprising an additional compound selected from the group consisting of a diamine, a polyalcohol, polyethylene oxide, a polyamine, a polyimine, 1-hydroxyethylidene-1,1-diphosphonic acid (HEDP), amino tri (methylene phosphonic acid) (ATMP), diethylenetriamine penta(methylene phosphonic acid) (DTPMPA), hexamethylenediaminetetra (methylenephosphonic acid) (HMDTMPA), 2-hydroxyethyliminobis(methylene phosphonic acid) (HEBMP), 2-phosphonobutane-1,2,4-tricarboxylic Acid (PBTC), ethylene diamine tetra(methylene phosphonic acid) (EDTMP), ethylene diamine disuccinatehydroyethyl imino diacetic acid (HIDA), hydroxyethyl ethylene diamine triacetic acid (HEDTA), diethylene triamine pentaacetic acid (DTPA), triethylene tetramine hexaacetic acid (TTHA), dicarboxymethyle glutamic acid tetrasodium salt (GLDA), 1,3-propane diamine tetraacetic acid (PDTA), 1,3-diamino-2-hydroxypropane tetraacetic acid (DPTA-OH), glycol ether diamine tetraacetic acid (GEDTA), trans-1,2-diaminocyclohexane-N,N,N′,N′-tetraacetic acid (CyDTA), 1-(4-aminobenzyl)ethylenediamine-N,N,N′,N′-tetraacetic acid, N-(2-acetamido)iminodiacetic acid, 1-(4-isothiocyanatobenzyl)ethylenediamine-N,N,N′,N′-tetraacetic acid, nitrilotris (methylene phosphonic acid) (NTMP), phosphonobutane tricarboxylic acid (PBTC), ethylene diamine tetra(methylene phosphonic acid) (EDTMP), alanine, arginine, asparagine, aspartic acid, cysteine, glutamine, glutamic acid, histidine, isoleucine, leucine, lysine, methionine, phenylalanine, praline, serine, threonine, tryptophan, tyrosine, valine, thioglycolic acid, thiodibutyric acid and mixtures thereof.