Inspecting method and inspecting apparatus for substrate surface
View Patent ↗To inspect a substrate such as a semiconductor substrate for surface roughness at high precision. The surface roughness of the substrate is measured in each frequency band of the surface roughness by applying a light to the substrate surface and detecting a scattered light or reflected light at a plurality of azimuth or elevation angles.
1. An inspecting method for inspecting a substrate surface, characterized by including:
a first step of applying a light to the substrate surface;
a second step of detecting a scattered light or reflected light from the substrate surface due to the applied light at a plurality of positions to obtain a plurality of electrical signals;
a third step of extracting a signal in a mutually different frequency band from each of the plurality of electrical signals; and
a fourth step of calculating a value regarding the surface roughness of the substrate surface through an arithmetical operation process of a plurality of extracted signals in the frequency bands.
2. The inspecting method according to claim 1 , characterized in that the third step includes extracting the signal in the frequency band preprogrammed for each of the plurality of electrical signals.
3. The inspecting method according to claim 1 , characterized in that the second step includes detecting the scattered light or reflected light from the substrate surface using a plurality of detectors disposed at positions with mutually different elevation angles.
4. The inspecting method according to claim 1 , characterized in that the fourth step includes calculating an RMS value as a value regarding the surface roughness of the substrate surface.
5. The inspecting method according to claim 4 , characterized by further including a fifth step of converting a spatial distribution state into a scalar value based on a spatial distribution of the calculated RMS value on the substrate.
6. The inspecting method according to claim 1 , characterized in that the fourth step includes calculating an average RMS value on the entire substrate surface as the value regarding the surface roughness of the substrate surface.
7. The inspecting method according to claim 1 , characterized in that the fourth step includes calculating a plurality of values regarding the surface roughness or film thickness of the substrate surface for the plurality of detectors.
8. The inspecting method according to claim 1 , characterized in that the fourth step includes calculating and displaying the plurality of values regarding the surface roughness or film thickness of the substrate surface for the plurality of detectors.
9. An inspecting apparatus for inspecting a substrate surface, characterized by comprising:
an illuminating optical system for applying a light to the substrate surface;
a plurality of detecting optical systems for detecting a scattered light or reflected light from the substrate surface due to the applied light at a plurality of positions to obtain a plurality of electrical signals; and
a processing section for extracting a signal in a mutually different frequency band from each of the plurality of electrical signals, and calculating a value regarding the surface roughness of the substrate surface through an arithmetical operation process of a plurality of extracted signals in the frequency bands.
10. The inspecting apparatus according to claim 9 , characterized in that the plurality of detecting optical systems are arranged at mutually different elevation angles.
11. The inspecting apparatus according to claim 9 , characterized in that at least one detecting optical system of the plurality of detecting optical systems has a beam splitter for splitting the optical path of the scattered light or reflected light and a plurality of sensors arranged on a plurality of optical paths split by the beam splitter, and an analyzer is disposed on the optical path of one sensor of the plurality of sensors.
12. The inspecting apparatus according to claim 9 , characterized by further comprising display means for displaying information derived from the value regarding the calculated substrate surface roughness.
13. The inspecting apparatus according to claim 12 , characterized in that the illuminating optical system is an obliquely illuminating optical system for applying the light from the oblique direction to the substrate.
14. The inspecting apparatus according to claim 12 , characterized in that the illuminating optical system is a vertically illuminating optical system for applying the light from the vertical direction to the substrate.
15. The inspecting apparatus according to claim 9 , characterized in that an arithmetic operation section calculates the plurality of values regarding the surface roughness of the substrate surface.