Semiconductor device and method of self-confinement of conductive bump material during reflow without solder mask
View Patent ↗A semiconductor device has a semiconductor die with an die bump pad and substrate with a trace line and integrated bump pad. Conductive bump material is deposited on the substrate bump pad or die bump pad. The semiconductor die over the substrate so that the bump material is disposed between the die bump pad and substrate bump pad. The bump material is reflowed without a solder mask around the die bump pad or substrate bump pad to form an interconnect. The bump material is self-confined within a footprint of the die bump pad or substrate bump pad. The bump material can be immersed in a flux solution prior to reflow to increase wettability. Alternatively, the interconnect includes a non-fusible base and fusible cap. The volume of bump material is selected so that a surface tension maintains self-confinement of the bump material within the bump pads during reflow.
1. A method of making a semiconductor device, comprising:
providing a semiconductor die having a die bump pad;
providing a substrate having a trace line with substrate bump pad;
depositing conductive bump material on the substrate bump pad or die bump pad;
mounting the semiconductor die over the substrate so that the conductive bump material is disposed between the die bump pad and substrate bump pad; and
reflowing the conductive bump material without a solder mask around the die bump pad or substrate bump pad to form an interconnect, wherein the conductive bump material is self-confined within a footprint of the die bump pad or substrate bump pad during reflow.
2. The method of claim 1 , wherein the conductive bump material is immersed in a flux solution prior to reflow to increase wettability.
3. The method of claim 1 , further including forming an insulating layer on an area around the die bump pad or substrate bump pad to make the area less wettable than the die bump pad and substrate bump pad.
4. The method of claim 1 , wherein the interconnect includes a non-fusible base and fusible cap.
5. The method of claim 1 , wherein a volume of conductive bump material deposited between the die bump pad and substrate bump pad is selected so that a surface tension maintains self-confinement of the conductive bump material substantially within the footprint of the die bump pad and substrate bump pad during reflow.
6. The method of claim 1 , wherein a height of the interconnect is equal to or less than a diameter of the interconnect.
7. A method of making a semiconductor device, comprising:
providing a semiconductor die having a die bump pad;
providing a substrate having a trace line with substrate bump pad;
depositing conductive bump material on the substrate bump pad or die bump pad;
mounting the semiconductor die over the substrate so that the conductive bump material is disposed between the die bump pad and substrate bump pad; and
reflowing the conductive bump material without a solder mask around the die bump pad or substrate bump pad to form an interconnect, wherein the conductive bump material is self-confined within a footprint of the die bump pad or substrate bump pad during reflow, wherein an escape pitch of the trace line is given D+PLT+W/2, wherein D is a base diameter of the interconnect, PLT is die placement tolerance, and W is the width of the trace line.
8. A method of making a semiconductor device, comprising:
providing a semiconductor die having a die bump pad;
providing a substrate having a trace line with substrate bump pad;
depositing conductive bump material on the substrate bump pad or die bump pad;
mounting the semiconductor die over the substrate so that the conductive bump material is disposed between the die bump pad and substrate bump pad; and
reflowing the conductive bump material without a solder mask around the die bump pad or substrate bump pad to form an interconnect, wherein the conductive bump material is self-confined within a footprint of the die bump pad or substrate bump pad during reflow, wherein an escape pitch of the trace line is given D/2+PLT+W/2, wherein D is a base diameter of the interconnect, PLT is die placement tolerance, and W is the width of the trace line.
9. A method of making a semiconductor device, comprising:
providing a first semiconductor structure having a first bump pad;
providing a second semiconductor structure having a second bump pad;
depositing conductive bump material between the first and second bump pads; and
reflowing the conductive bump material without a solder mask around the first and second bump pads to form an interconnect, wherein the conductive bump material is self-confined within a footprint of the first bump pad or second bump pad during reflow.
10. The method of claim 9 , wherein the conductive bump material is immersed in a flux solution prior to reflow to increase wettability.
11. The method of claim 9 , further including forming an insulating layer on an area around the first bump pad or second bump pad to make the area less wettable than the first and second bump pads.
12. The method of claim 9 , wherein the interconnect includes a non-fusible base and fusible cap.
13. The method of claim 9 , wherein the volume of conductive bump material deposited between the first and second bump pads is selected so that a surface tension maintains self-confinement of the conductive bump material substantially within the first and second bump pads during reflow.
14. The method of claim 9 , wherein a height of the interconnect is equal to or less than a diameter of the interconnect.
15. A method of making a semiconductor device, comprising:
depositing conductive bump material over a first bump pad; and
reflowing the conductive bump material without a solder mask, wherein the conductive bump material is self-confined within a footprint of the first bump pad during reflow and an escape pitch of the trace line is given D+PLT+W/2, wherein D is a base diameter of the interconnect, PLT is die placement tolerance, and W is the width of the trace line.
16. The method of claim 15 , wherein the conductive bump material is immersed in a flux solution prior to reflow to increase wettability.
17. The method of claim 15 , further including forming an insulating layer on an area around the first bump pad to make the area less wettable than the first bump pad.
18. The method of claim 15 , wherein reflowing the conductive bump material forms an interconnect.
19. The method of claim 18 , wherein a height of the interconnect is equal to or less than a diameter of the interconnect.
20. The method of claim 15 , wherein the volume of conductive bump material deposited over the first bump pad is selected so that a surface tension maintains self-confinement of the conductive bump material.
21. A semiconductor device, comprising:
a semiconductor die having a first bump pad;
a substrate having a second bump pad;
an interconnect formed between the first and second bump pads by reflowing conductive bump material without a solder mask, wherein the conductive bump material is self-confined within a footprint of the first pump pad or second bump pad.
22. The semiconductor device of claim 21 , wherein the conductive bump material is immersed in a flux solution prior to reflow to increase wettability.
23. The semiconductor device of claim 21 , further including an insulating layer formed on an area around the first bump pad or second bump pad to make the area less wettable than the first and second bump pads.
24. The semiconductor device of claim 21 , wherein the interconnect includes a non-fusible base and fusible cap.
25. The semiconductor device of claim 21 , wherein the volume of conductive bump material deposited between the first and second bump pads is selected so that a surface tension maintains self-confinement of the conductive bump material substantially within the first and second bump pads during reflow.