Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof
View Patent ↗Claimed and disclosed is a semiconductor device including a transistor having a gate insulating film structure containing nitrogen or fluorine in a compound, such as metal silicate, containing metal, silicon and oxygen, a gate insulating film structure having a laminated structure of an amorphous metal oxide film and metal silicate film, or a gate insulating film structure having a first gate insulating film including an oxide film of a first metal element and a second gate insulating film including a metal silicate film of a second metal element.
1. A manufacturing method of a semiconductor device having a gate insulating film formed on a semiconductor substrate, the gate insulating film including first and second different regions, comprising:
forming a silicon oxide film series insulating film on the semiconductor substrate of said first region;
forming metal oxide films on the silicon oxide film series insulating film of said first region and on the semiconductor substrate of said second region; and
forming an insulating film containing metal, silicon and oxygen by reacting the silicon oxide film of said first region and silicon of the semiconductor substrate with each other by the heat treatment,
wherein an oxygen concentration of the metal oxide films is set lower than a value determined by a stoichiometric ratio.