Nonvolatile memory device, method of manufacturing the nonvolatile memory device, and method of manufacturing flat panel display device provided with the nonvolatile memory device
View Patent ↗Provided are a nonvolatile memory device, a method of manufacturing the nonvolatile memory device, and a method of manufacturing a flat panel display device provided therein with the nonvolatile memory device. According to an embodiment, an amorphous silicon layer is formed on a substrate, and then annealed by using an Excimer laser to form a crystallized silicon layer. A nitrogen plasma treatment is performed for the crystallized silicon layer to planarize an upper surface of the crystallized silicon layer. An ONO layer is formed on the nitrogen plasma-treated crystallized silicon layer. A metal layer is formed on the ONO layer. The metal layer, the ONO layer and the nitrogen plasma-treated crystallized silicon layer are patterned.
1. A method of manufacturing a nonvolatile memory device, the method comprising:
forming an amorphous silicon layer on a substrate;
annealing the amorphous silicon layer by using an Excimer laser to form a crystallized silicon layer;
performing a nitrogen plasma treatment for the crystallized silicon layer to planarize an upper surface of the crystallized silicon layer;
forming an ONO layer on the nitrogen plasma-treated crystallized silicon layer;
forming a metal layer on the ONO layer; and
patterning the metal layer, the ONO layer and the nitrogen plasma-treated crystallized silicon layer.
2. The method of claim 1 , prior to the forming of the amorphous silicon layer, further comprising forming a buffer layer on the substrate.
3. The method of claim 2 , wherein the forming of the buffer layer comprises:
forming a buffer silicon nitride layer on the substrate; and
forming a buffer silicon oxide layer on the buffer silicon nitride layer.
4. The method of claim 3 , wherein the buffer silicon nitride layer has a thickness range of 10-1000 Å, and the buffer silicon oxide layer has a thickness in the range of 10-1000 Å.
5. The method of claim 1 , wherein the nitrogen plasma treatment is performed under the conditions of 200 W to 1550 W RF energy, 100 sccm to 800 sccm nitrogen dose and 10 mtorr to 20 mtorr chamber pressure.
6. The method of claim 1 , wherein the amorphous silicon layer has a thickness in the range of 500-3000 Å.
7. The method of claim 1 , wherein performing the nitrogen plasma treatment forms a silicon nitride layer on the crystallized silicon layer.
8. The method of claim 1 , wherein performing the nitrogen plasma treatment forms a silicon nitride layer on the crystallized silicon layer, wherein the ONO layer is formed on the silicon nitride layer.
9. The method of claim 1 , wherein the amorphous silicon layer and the ONO layer are formed by using PECVD.
10. The method of claim 1 , wherein the substrate is a glass substrate.
11. A method of manufacturing a flat panel display device provided therein with a nonvolatile memory device, the method comprising:
forming a buffer layer on a glass substrate;
forming an amorphous silicon layer on the buffer layer;
annealing the amorphous silicon layer by using an Excimer laser to form a crystallized silicon layer;
performing a nitrogen plasma treatment for the crystallized silicon layer to planarize an upper surface of the crystallized silicon layer;
forming an ONO layer on the nitrogen plasma-treated crystallized silicon layer;
forming a metal layer on the ONO layer; and
patterning the metal layer, the ONO layer and the nitrogen plasma-treated crystallized silicon layer.
12. The method of claim 11 , wherein a silicon nitride layer is formed on the crystallized silicon layer by the nitrogen plasma treatment.
13. The method of claim 11 , wherein the nitrogen plasma treatment is performed under the conditions of 200 W to 1550 W RF energy, 100 sccm to 800 sccm nitrogen dose and 10 mtorr to 20 mtorr chamber pressure.
14. The method of claim 11 , wherein the amorphous silicon layer is formed at a low temperature equal to or less than 500° C. by using PECVD.