IP Library Granted Patent US 8,132,966
Granted Patent B2
US 8,132,966 · App. 12/477,505 · Granted Mar 13, 2012

Rotary flexure and air bearing support for rotary indexing system

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,132,966
App. No.
12/477,505
Granted
Mar 13, 2012
Kind
B2
Abstract

A highly position-stabilized indexable table or “dial” in which the dial is supported relative to a steel surface on a frame by one or more air bearings. A flexure mechanically connects the indexing motor to the dial in such a way as to be torsionally non-compliant, but axially compliant to decouple the dial from the motor shaft along the Z-axis. In one embodiment, the air bearings are mounted to the frame at uniformly angularly displaced positions under the dial. In another embodiment, the bearings are partially integrated into the dial. Negative (suction) preload can be used in either embodiment to increase air bearing stiffness and/or to allow inverted processing; i.e., mounting part fixtures on an undersurface of the dial.

Claims (11)

1. An indexable dial system for translating workpieces in and out of a processing station comprising:

a dial having an axis of rotation;

a motor for selectively indexing the dial about said axis;

air bearing means supporting said dial; and

a flexure mechanically connecting said motor to said dial, said flexure being essentially torsionally non-compliant about said axis but compliant along said axis.

2. A system according to claim 1 wherein the air bearing means comprises a plurality of air bearings at spaced locations around said axis.

3. A system as defined in claim 2 further comprising a frame supporting said motor, said plurality of air bearings being attached to said frame under said dial.

4. A system as described in claim 1 wherein said air bearing means is formed in part in the underside of said dial.

5. A system as defined in claim 1 further including means for providing a negative pre-load on said air bearing means.

6. A system as defined in claim 1 further comprising a frame and wherein said air bearing means are mounted to said dial, said air bearing means further comprising vacuum means for providing pneumatic forces tending to draw said dial toward said frame.

7. A system as defined in claim 1 wherein the air bearing means is arranged to hold the dial against the force of gravity such that the dial is inverted.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO. 7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0227. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (TERM LOAN). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055006/0492 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
PATENT SECURITY AGREEMENT (TERM LOAN) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0227 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 4, 2009
From: KOSMOWSKI, MARK T.
To: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 022778/0299 →