Magnetron unit moving apparatus for preventing magnetization and magnetron sputtering equipment having the same
A magnetron unit moving apparatus for preventing magnetization and magnetron sputtering equipment having the same. The magnetron unit moving apparatus includes a magnetron unit disposed adjacent to a target, to generate a specific magnetic field, and a movement unit to space the magnetron unit and the target apart such that a strength of a magnetic field generated over the target is within a predetermined reference strength range. It is possible to space the target and the magnetron unit apart so as to prevent the target from being magnetized when a process is not performed.
1. A magnetron unit moving apparatus to prevent magnetization of a planar target having a length and a width, comprising:
a magnetron unit installed in a vacuum chamber comprising a first region and a second region and disposed adjacent to the target, the magnetron unit consisting of a magnet to generate a magnetic field and a fixing plate supporting the magnet and configured to rotate around an axis parallel with the length of the target;
an isolation plate disposed in the vacuum chamber, surrounding the magnetron unit, to isolate the first region from the second region, the isolation plate being configured to absorb the magnetic field; and
a movement unit comprising a rotation unit configured to rotate the fixing plate between a first position where sputtering occurs, and a second position where sputtering is prevented, such that the magnet is disposed between the fixing plate and the target, when the fixing plate is in the first position, and the fixing plate is disposed between the magnet and the target and a strength of a magnetic field generated over the target is within a reference strength range that prevents magnetization of the target, when the fixing plate is in the second position.
2. The magnetron unit moving apparatus according to claim 1 , wherein the movement unit further comprises:
a magnetic field measuring unit disposed adjacent to one side of the target, to measure the strength of the magnetic field generated over the target;
a position moving unit connected with the magnetron unit, to move the magnetron unit; and
a controller electrically connected with the magnetic field measuring unit, to operate the position moving unit to space the magnetron unit apart from the target such that the measured strength of the magnetic field is within the reference strength range.
3. The magnetron unit moving apparatus according to claim 2 , wherein the position moving unit is a variable cylinder connected with the magnetron unit and receives an operation signal from the controller to perform an expansion and contraction operation.
4. The magnetron unit moving apparatus according to claim 2 , wherein:
the rotation unit receives an operation signal from the controller to perform the rotation; and
the rotation unit comprises a rotation axis supporting the fixing plate and having a first end that is rotatably supported at a specific position and an opposing second end, and a rotation motor connected to the second end of the rotation axis to rotate the rotation axis.
5. The magnetron unit moving apparatus according to claim 2 , wherein:
the movement unit further comprises a selector electrically connected with the controller;
the position moving unit is a variable cylinder connected with the magnetron unit to receive an operation signal from the controller to perform an expansion and contraction operation;
the rotation unit comprises:
a rotation axis disposed supporting the fixing plate and having a first end that is rotatably supported at a specific position and an opposing second end; and
a rotation motor connected to the second end of the rotation axis to rotate the rotation axis; and
the selector transfers an electrical signal to the controller to operate the position moving unit and/or the rotation unit.
6. The magnetron unit moving apparatus according to claim 4 ,
wherein the magnetron unit is positioned between the first region, in which the target is disposed, and the second region.
7. The magnetron unit moving apparatus according to claim 2 , wherein the magnetic field measuring unit measures the strength of the magnetic field-over a surface of the target opposite to the surface of the target facing the magnetron unit.
8. The magnetron unit moving apparatus according to claim 1 , wherein the reference strength range of the magnetic field ranges from 0 to 10 gauss.
9. A magnetron sputtering equipment having a magnetron unit moving apparatus to prevent magnetization of a planar target having a length and a width, the magnetron sputtering equipment comprising:
a vacuum chamber comprising a first region and a second region;
a chuck disposed in a lower part of the vacuum chamber to receive a high frequency from outside and to receive a substrate;
a target installed in an upper part of the vacuum chamber to face the chuck;
a magnetron unit installed in a vacuum chamber and disposed above the target, the magnetron unit consisting of a magnet to generate a magnetic field and a fixing plate supporting the magnet and configured to rotate around an axis parallel with the length of the target;
an isolation plate disposed in the vacuum chamber, surrounding the magnetron unit, to isolate the first region from the second region, the isolation plate being configured to absorb the magnetic field; and
a movement unit comprising a rotation unit configured to rotate the fixing plate between a first position where sputtering occurs, and a second position where sputtering is prevented, such that the magnet is disposed between the fixing plate and the target, when the fixing plate is in the first position, and the fixing plate is disposed between the magnet and the target and a strength of a magnetic field generated over the target is within a reference magnetic field strength range that prevents magnetization of the target, when the fixing plate is in the second position.
10. The magnetron sputtering equipment according to claim 9 , wherein:
the rotation unit receives an operation signal from the controller to perform the rotation; and
the rotation unit comprises a rotation axis supporting the fixing plate and having a first end that is rotatably supported in the vacuum chamber and an opposing second end, and a rotation motor connected to the second end of the rotation axis to rotate the rotation axis.
11. The magnetron sputtering equipment according to claim 10 , wherein the magnetron unit is positioned between the first region, in which the target is disposed, and the second region.
12. The magnetron sputtering equipment according to claim 9 , wherein the reference magnetic field strength range ranges from 0 to 10 gauss.
13. The magnetron sputtering equipment according to claim 9 ,
wherein the magnetron unit is positioned between the first region, in which the target is disposed, and the second region.
14. The magnetron unit moving apparatus according to claim 5 ,
wherein the magnetron unit is positioned between the first region, in which the target is disposed, and the second region.