Method of fabricating bonding structure
A method of fabricating a bonding structure having compliant bumps includes first providing a first substrate and a second substrate. The first substrate includes first bonding pads. The second substrate is disposed on one side of the first substrate and includes second bonding pads and compliant bumps disposed thereon. The second bonding pads are opposite to the first bonding pads. Next, a non-conductive adhesive layer and ball-shaped spacers are formed between the first and the second substrates. Finally, the first substrate, the non-conductive adhesive layer, and the second substrate are compressed, such that the compliant bumps on the second bonding pads of the second substrate pass through the non-conductive adhesive layer and are electrically connected to the first bonding pads of the first substrate, respectively. The ball-shaped spacers are distributed in the non-conductive adhesive layer sandwiched between the first and the second substrates for maintaining the gap therebetween.
1. A method of fabricating a bonding structure comprising a plurality of compliant bumps, the method comprising:
providing a first substrate and a second substrate, wherein the first substrate comprises a plurality of first bonding pads, and the second substrate is disposed on one side of the first substrate and comprises a plurality of second bonding pads and the compliant bumps disposed thereon, the second bonding pads being opposite to the first bonding pads;
forming a non-conductive adhesive layer and a plurality of ball-shaped spacers between the first and the second substrates; and
compressing the first substrate, the non-conductive adhesive layer and the second substrate, such that the compliant bumps on the second bonding pads of the second substrate pass through the non-conductive adhesive layer and are electrically connected to the first bonding pads of the first substrate, wherein the ball-shaped spacers are distributed in the non-conductive adhesive layer sandwiched between the first and the second substrates for keeping the gap therebetween.
2. The method of claim 1 , wherein the method of forming the non-conductive adhesive layer and the ball-shaped spacers between the first and the second substrates comprises:
distributing the ball-shaped spacers in the non-conductive adhesive layer; and
attaching the non-conductive adhesive layer having the ball-shaped spacers distributed therein to the first substrate, the non-conductive adhesive layer covering the first bonding pads.
3. The method of claim 1 , wherein the method of forming the non-conductive adhesive layer and the ball-shaped spacers between the first and the second substrates comprises:
distributing the ball-shaped spacers in the non-conductive adhesive layer; and
attaching the non-conductive adhesive layer having the ball-shaped spacers distributed therein to the second substrate, the non-conductive adhesive layer covering the compliant bumps.
4. The method of claim 1 , wherein the method of forming the non-conductive adhesive layer and the ball-shaped spacers between the first and the second substrates comprises:
attaching the non-conductive adhesive layer to the first substrate, the non-conductive adhesive layer covering the first bonding pads; and
distributing the ball-shaped spacers on the non-conductive adhesive layer.
5. The method of claim 1 , wherein the method of forming the non-conductive adhesive layer and the ball-shaped spacers between the first and the second substrates comprises:
attaching the non-conductive adhesive layer to the second substrate, the non-conductive adhesive layer covering the compliant bumps; and
distributing the ball-shaped spacers on the non-conductive adhesive layer.
6. The method of claim 1 , wherein the method of compressing the first substrate, the non-conductive adhesive layer and the second substrate comprises a thermal bonding process, an ultraviolet-light illuminating bonding process, an ultrasonic-wave bonding process, or a combination thereof.
7. The method of claim 1 , wherein in the cross-section of each of the compliant bumps parallel to of a surface of the first substrate, the length of the narrowest edge of each of the compliant bumps is smaller than the diameter of each of the ball-shaped spacers.
8. The method of claim 1 , wherein the height of each of the compliant bumps exceeds the diameter of each of the ball-shaped spacers.