Wafer level optical elements and applications thereof
View Patent ↗The present invention provides wafer level optical elements that obviate a substrate wafer or a portion thereof disposed between optical structures or optical surfaces of the element.
1. A method of producing a plurality of optical elements comprising:
providing a first wafer comprising a plurality of first molded lens structures, the first wafer coupled to a substrate;
coupling a first perforated wafer to the first wafer;
removing the substrate to expose a surface of the first wafer;
providing a second wafer comprising a plurality of second molded lens structures; and
coupling the second wafer to the surface of the first wafer, wherein an interface is formed between the first lens structures and the second lens structures.
2. The method of claim 1 , wherein providing the first wafer comprises providing a first lens material and forming the first lens material into the first wafer comprising the plurality of first lens structures.
3. The method of claim 2 , wherein coupling a first perforated wafer to the first wafer comprises removing the first wafer from a mold to provide a mounting surface for the first perforated wafer.
4. The method of claim 1 , wherein the first lens material comprises a polymeric material.
5. The method of claim 1 , wherein providing the second wafer comprises providing a second lens material and molding the second lens material into the second wafer comprising the plurality of second lens structures.
6. The method of claim 5 , wherein coupling the first wafer and the second wafer comprises molding the second wafer on the surface of the first wafer.
7. The method of claim 1 further comprising disposing a plurality of apertures between the first wafer and the second wafer.
8. The method of claim 7 , wherein disposing a plurality of apertures between the first wafer and the second wafer comprises selectively depositing a material on a surface of the first wafer or the second wafer.
9. The method of claim 7 , wherein disposing a plurality of apertures between the first wafer and the second wafer comprises depositing a material on a surface of the first wafer or the second wafer and etching the material to provide a plurality of apertures in the material.
10. The method of claim 9 , wherein etching comprises chemical etching or radiative etching.
11. The method of claim 1 , wherein the second lens material comprises a polymeric material.
12. The method of claim 1 , wherein the first molded lens structures comprise a polymeric material different from the second molded lens structures.
13. The method of claim 1 , further comprising coupling a second perforated wafer to a surface of the second wafer.
14. The method of claim 1 , further comprising singulating the plurality of optical elements.
15. The method of claim 1 , wherein coupling the first perforated wafer to the first wafer occurs prior to removing the substrate to expose the surface of the first wafer and prior to providing the second wafer.