Substrate processing apparatus
A substrate processing apparatus in accordance with the present invention includes a process chamber configured to accommodate a substrate, a gas supply line configured to supply a gas to an inside of the process chamber, and an exhaust line configured to exhaust the inside of the process chamber. The gas supply line of the substrate processing apparatus includes a preheating unit preheating the gas supplied from a gas source, a metal pipeline having an angled section wherein the metal pipe line connects the preheating unit and the inside of the process chamber to supply the gas preheated by the preheating unit into the process chamber, and a heat dissipation member covering the angled section to dissipate heat from the angled section.
1. A substrate processing apparatus, comprising:
a process chamber configured to accommodate a substrate;
a gas supply line configured to supply a gas to an inside of the process chamber; and
an exhaust line configured to exhaust the inside of the process chamber,
wherein the gas supply line comprises:
a preheating unit preheating the gas supplied from a gas source,
a metal pipeline having an angled section, the metal pipe line connecting the preheating unit and the inside of the process chamber to supply the gas preheated by the preheating unit into the process chamber, and
a heat dissipation member covering the angled section to dissipate heat from the angled section,
the heat dissipation member comprising a pair of metal members facing each other to cover an outer surface of the angled section and a clamping means to fasten the pair of metal members to each other.
2. The apparatus of claim 1 , wherein each of facing surfaces of the pair of metal members includes a recess having a same shape as that of the angled section such that the angled section is disposed within the recess.
3. A substrate processing apparatus, comprising:
a process chamber configured to accommodate a substrate;
a gas supply line configured to supply a gas to an inside of the process chamber; and
an exhaust line configured to exhaust the inside of the process chamber,
wherein the gas supply line comprises:
a preheating unit preheating the gas supplied from a gas source,
a metal pipeline having an angled section, the metal pipe line connecting the preheating unit and the inside of the process chamber to supply the gas preheated by the preheating unit into the process chamber,
a heat dissipation member covering the angled section to dissipate heat from the angled section,
a quartz pipeline having an upstream end connected to the preheating unit, and
a joint disposed between a downstream end of the quartz pipeline and an upstream end of the metal pipeline.
4. The apparatus of claim 3 , wherein the joint comprises:
a first flange connected to the downstream end of the quartz pipeline; a second flange connected to the upstream end of the metal pipeline; and
a sealing member disposed between the first flange and the second flange.
5. The apparatus of claim 4 , wherein the second flange comprises:
a cooling medium flow channel connected between a cooling medium supply pipe; and
a cooling medium exhaust pipe to circulate a cooling medium within the second flange.
6. The apparatus of claim 5 , wherein one of the cooling medium supply pipe and the cooling medium exhaust pipe is in thermal contact with the heat dissipation member.