Electronic component and method for manufacturing electronic component
A method for manufacturing an electronic component includes a first step of preparing a piezoelectric body with a flat surface, a second step of implanting ions into the piezoelectric body such that an ion-implanted layer is formed in the piezoelectric body, a third step of forming sacrificial layers on the flat surface of the piezoelectric body, a fourth step of forming an insulating body over the flat surface of the piezoelectric body and the sacrificial layers to form a piezoelectric structure, a fifth step of dividing the piezoelectric body at the ion-implanted layer to form a piezoelectric laminar structure in which a piezoelectric film separated from the piezoelectric body is bonded to the insulating body, a sixth step of forming electrodes on portions of a division surface of the piezoelectric film, and a seventh step of removing the sacrificial layers from the piezoelectric laminar structure.
1. An electronic component comprising:
a support member;
a piezoelectric film having a pair of principal surfaces substantially parallel to each other and including a first portion that is not supported by the support member and a second portion supported by the support member;
an adhesive layer which is disposed between the support member and the second portion of the piezoelectric film and which is in contact with the support member and the second portion of the piezoelectric film; and
electrodes arranged on at least one of the principal surfaces of the first portion of the piezoelectric film; wherein
the adhesive layer has a first surface in contact with the support member and a second surface in contact with the second portion of the piezoelectric film and the first surface of the adhesive layer has a roughness greater than that of the second surface thereof.
2. The electronic component according to claim 1 , wherein the principal surfaces of the piezoelectric film are mirror surfaces.
3. The electronic component according to claim 1 , wherein the electrodes are arranged to excite a plate wave propagating through the piezoelectric film.