IP Library Granted Patent US 8,707,550
Granted Patent B2
US 8,707,550 · App. 12/508,780 · Granted Apr 29, 2014

Bonding machine incorporating dual-track transfer mechanism

Inventors: Keng Yew James Song (Singapore, SG); Ka Shing Kenny Kwan (Singapore, SG); Choong Kead Leslie Lum (Singapore, SG); Ting Yu He (Singapore, SG)
Assignee: ASM Technology Singapore Pte Ltd
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Quick Facts
Patent No.
US 8,707,550
App. No.
12/508,780
Granted
Apr 29, 2014
Kind
B2
Abstract

A bonding apparatus for bonding electronic devices including substrates comprises first and second rails arranged adjacent to each other which are configured to align the substrates in vertical orientations during transportation along the rails. A bonding system is locatable over a first bonding site which is located along the first rail and a second bonding site which is located along the second rail. A first indexer is located adjacent to the first rail and a second indexer is located adjacent to the second rail wherein each indexer is independently operative to transport a substrate along one rail while a substrate held on the other rail is being bonded. A container located at one end of the rails for holding multiple unbonded substrates is operative to feed unbonded substrates directly to the rails.

Claims (15)

1. A bonding apparatus for bonding electronic devices including substrates, comprising:

first and second rails arranged adjacent to each other which are configured to align the substrates in vertical orientations during transportation along the first and second rails;

a bonding system locatable over a first bonding site located along the first rail and a second bonding site located along the second rail;

a first indexer located adjacent to the first rail and a second indexer located adjacent to the second rail, each indexer being independently operative to transport a substrate along one rail while a substrate held on the other rail is being bonded;

an input magazine located at one end of the first and second rails for holding multiple unbonded substrates in vertical orientations and operative to feed unbonded substrates directly to the first and second rails; and

an output magazine located at an opposite end of the first and second rails from the input magazine, the output magazine holding multiple bonded substrates in vertical orientations,

wherein each of the first and second rails is configured and operative to transport the substrates from the input magazine to the output magazine, and a distance between the first and second rails is adjustable to align the first and second rails with respective multiples of a substrate partition pitch of the input and output magazines in order to simultaneously receive unbonded substrates from the input magazine, and to simultaneously unload bonded substrates to the output magazine, the substrate partition pitch being the distance between adjacent partitions of the input and output magazines separating adjacent substrates.

2. The bonding apparatus as claimed in claim 1 , further comprising a rail pitch adjustable guide on which the first rail is mounted such that a distance between the first and second rails is adjustable.

3. The bonding apparatus as claimed in claim 2 , wherein each rail is mounted on an independent mounting base so that each rail functions in a single track configuration.

4. The bonding apparatus as claimed in claim 1 , further comprising at least one container holder that is operative to hold a plurality of input magazines.

5. The bonding apparatus as claimed in claim 4 , wherein the container holder is configured to hold at least four input magazines.

6. The bonding apparatus as claimed in claim 4 , wherein the container holder is configured to hold two columns of input magazines.

7. The bonding apparatus as claimed in claim 6 , wherein the each column of input magazines is alternately movable into alignment with the first and second rails for feeding further substrates to the first and second rails.

8. The bonding apparatus as claimed in claim 4 , wherein the container holder is mounted to a container holder table that is operative to continuously move and align the input magazines simultaneously with the first and second rails for feeding additional substrates to the rails.

9. The bonding apparatus as claimed in claim 1 , further comprising a first heater block next to the first bonding site and a second heater block next to the second bonding site, wherein the first heater block is spaced from the second heater block so that each heater block is substantially isolated from vibrations at the other heater block.

Assignments (2)
CHANGE OF NAME Recorded Jan 20, 2023
From: ASM TECHNOLOGY SINGAPORE PTE LTD
To: ASMPT SINGAPORE PTE. LTD.
Reel/Frame 062444/0830 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 24, 2009
From: SONG, KENG YEW JAMES; KWAN, KA SHING KENNY; LUM, CHOONG KEAD LESLIE; HE, TING YU
To: ASM TECHNOLOGY SINGAPORE PTE LTD
Reel/Frame 023002/0133 →
Continuity (1)
Related Publication 20110016707A1 · Jan 27, 2011