Image sensor and method for manufacturing the same
View Patent ↗Provided are an image sensor and a method for manufacturing the same. The image sensor comprises: a readout circuitry, an interconnection, a contact plug, and an image sensing device. The readout circuitry is formed in a first substrate. The interconnection is electrically connected to the readout circuitry over the first substrate. The contact plug is formed over the interconnection, and includes an insulating layer at regions in an upper side thereof. The image sensing device is formed over the contact plug.
1. An image sensor comprising:
a readout circuitry in a first substrate;
an interconnection electrically connected to the readout circuitry over the first substrate;
a contact plug partially comprising an insulating layer in an upper surface thereof over the interconnection, the insulating layer in the upper surface of the contact plug being an insulating portion within a perimeter of the contact plug such that a metal portion of the contact plug is outside the insulating portion; and
an image sensing device formed over the contact plug,
wherein the contact plug comprises a hole on the surface thereof, the hole being filled with the insulating layer.
2. The image sensor according to claim 1 , wherein the insulating layer has a surface area occupying about 5% to about 30% of the total top surface area of the contact plug.
3. The image sensor according to claim 1 , further comprising an electrical junction region electrically connecting the readout circuitry and the interconnection.
4. The image sensor according to claim 3 , wherein the electrical junction region comprises:
a first conductive type ion implantation region in the first substrate; and
a second conductive type ion implantation region over the first conductive type ion implantation region.
5. The image sensor according to claim 3 , further comprising a first conductive connection region between the electrical junction region and the interconnection.
6. The image sensor according to claim 5 , wherein the first conductive connection region is electrically connected to the interconnection at an upper part of the electrical junction region.
7. The image sensor according to claim 5 , wherein the first conductive connection region is at one side of the electrical junction region and electrically connects the interconnection to the electrical junction region.
8. The image sensor according to claim 3 , wherein the readout circuit has a potential difference between the source and drain of a transistor, the electrical junction region being at the source of the transistor.
9. The image sensor according to claim 8 , wherein the transistor is a transfer transistor, and an ion implantation concentration of the source of the transistor is lower than that of a floating diffusion region at the drain of the transistor.
10. A method for manufacturing an image sensor, comprising:
forming a readout circuitry in a first substrate;
forming an interconnection connected to the readout circuitry over the first substrate;
forming a contact plug partially comprising an insulating layer in an upper part thereof over the interconnection; and
forming an image sensing device over the contact plug;
wherein the forming of the contact plug comprises:
forming a metal layer over the interconnection, including in a trench;
forming a hole in the surface of the metal layer over the trench;
filling the hole with an insulating layer; and
forming the contact plug within the trench by planarizing the metal layer, wherein a portion of the insulating layer in the hole remains after planarizing the metal layer.
11. The method according to claim 10 , wherein the insulating layer has a surface area occupying about 5% to about 30% of the total top surface area of the contact plug.
12. The method according to claim 10 , further comprising forming an electrical junction region in the first substrate and electrically connected to the readout circuitry.
13. The method according to claim 12 , further comprising forming a first conductive connection region between the electrical junction region and the interconnection, the first conductive connection region electrically connecting the interconnect to the electrical junction region.
14. The method according to claim 13 , wherein the first conductive connection region is electrically connected to the interconnection at an upper part of the electrical junction region.
15. The method according to claim 13 , wherein the first conductive connection region is at one side of the electrical junction region.
16. The method according to claim 12 , wherein the forming of the electrical junction region comprises:
forming a first conductive type ion implantation region in the first substrate; and
forming a second conductive type ion implantation region over the first conductive type ion implantation region.