Modulation of stress in stress film through ion implantation and its application in stress memorization technique
View Patent ↗Some example embodiments of the invention provide a method to improve the performance of MOS devices by increasing the stress in the channel region. An example embodiment for a NMOS transistor is to form a tensile stress layer over a NMOS transistor. A heavy ion implantation is performed into the stress layer and then an anneal is performed. This increases the amount of stress from the stress layer that the gate retains/memorizes thereby increasing device performance.
1. A method of fabricating a semiconductor device comprising:
providing a substrate with a first device region, the first device region includes a transistor having
a gate with a gate electrode, and
first and second doped source/drain (S/D) regions adjacent to the gate;
forming a stress layer having a first stress type with a first stress value over the transistor;
processing the stress layer to relax the stress in the stress layer to a relaxed stress which is less than the first stress value; and
processing the relaxed stress layer to increase the relaxed stress and to cause the gate electrode to retain the increased relaxed stress of the first stress type of the stress layer, the gate electrode applies the increased relaxed stress to a channel of the transistor under the gate.
2. The method of claim 1 wherein:
processing the stress layer includes implanting ions into the stress layer to relax the stress in the stress layer to the relaxed stress; and
processing the relaxed stress layer to increase the relaxed stress includes annealing which increases the relaxed stress in the stress layer to the increased relaxed stress of the first stress type.
3. The method of claim 2 wherein the annealing comprises laser annealing.
4. The method of claim 2 wherein implanting ions comprises implanting ions with a molecular weight greater than or equal to 28.
5. The method of claim 2 wherein implanting ions comprising implanting ions at a dose of about 0.5E15 to 5E15 atom/cc at an energy of about 5 to 50 KeV.
6. The method of claim 5 wherein implanting ions comprises implanting ions comprising Ge, Zr, Xe, In, Sb, Si, N, O, C or a combination thereof.
7. The method of claim 5 wherein the annealing comprises laser annealing.
8. The method of claim 1 wherein the gate electrode comprises an amorphous gate electrode which is crystallized by the processing to increase the relaxed stress to retain the increased relaxed stress.
9. The method of claim 8 wherein the gate electrode comprises silicon.
10. The method of claim 1 wherein the stress layer comprises silicon nitride or silicon oxynitride.
11. The method of claim 2 wherein the annealing also serves as a S/D anneal.
12. The method of claim 1 wherein the increased relaxed stress is greater than the first stress value.
13. The method of claim 1 wherein:
the transistor comprises a n-type transistor; and
the stress of the stress layer comprises a tensile stress.
14. The method of claim 1 comprises forming a dielectric layer over the transistor before forming the stress layer.
15. The method of claim 1 comprises removing the stress layer after the processing the relaxed stress layer to increase the relaxed stress.
16. The method of claim 3 wherein the laser annealing is performed at a temperature of about greater than about 950° C.
17. The method of claim 3 wherein the laser annealing is performed at a temperature of about 925 to 1300° C.
18. A method of fabricating a device comprising:
providing a substrate prepared with a feature;
forming a stress layer having a first stress type with a first stress value over the feature;
processing the stress layer to relax the stress in the stress layer to a relaxed stress which is less than the first stress value; and
processing the relaxed stress layer to increase the relaxed stress and to cause the feature to retain the increased relaxed stress of the first stress type of the stress layer.
19. The method of claim 18 wherein the feature comprises an amorphous material which is crystallized by the processing to increase the relaxed stress.
20. A method of fabricating an integrated circuit comprising:
providing a substrate with a first device region, the first device region includes a transistor having
a gate with a gate electrode, the gate electrode comprising an amorphous gate electrode, and
first and second doped source/drain (S/D) regions adjacent to the gate;
forming a stress layer having a first stress type with a first stress value over the transistor;
processing the stress layer to relax the stress in the stress layer to a relaxed stress which is less than the first stress value; and
processing the relaxed stress layer to increase the relaxed stress and to crystallize the gate electrode and to cause the gate electrode to retain the increased relaxed stress of the first stress type of the stress layer.