Energy sources for curing in an imprint lithography system
View Patent ↗Energy sources and methods for curing in an imprint lithography system are described. The energy sources may include one or more energy elements positioned outside of the viewing range of an imaging unit monitoring elements of the imprint lithography system. Each energy source is configured to provide energy along a path to solidify polymerizable material on a substrate.
1. An imprint lithography system, comprising:
an imaging unit having a viewing range configured to monitor a template and a substrate, the imaging unit positioned in superimposition with the template and the substrate, the substrate having a surface having multiple regions with polymerizable material deposited thereon; and,
multiple energy sources, each having at least one energy element, positioned outside of the viewing range of the imaging unit, each energy source configured to provide energy along an energy path and wherein the elements of each energy source are inclined at angles so as to provide substantially uniform energy within a region of the substrate for solidifying the polymerizable material at each such region.
2. The system of claim 1 , wherein each energy source has a single energy element.
3. The system of claim 1 , wherein each energy source has multiple energy elements.
4. The system of claim 1 , wherein at least one energy source has a single energy element and at least one energy source has multiple energy elements.
5. The system of claim 1 , wherein at least one energy element is a UV LED.
6. The system of claim 1 , wherein the energy sources are in a ring formation.
7. The system of claim 1 , wherein the energy sources are in a cone formation.
8. The system of claim 1 , wherein the energy sources are in a pyramid formation.
9. The system of claim 1 , further comprising a supplementary energy source positioned outside of the viewing range of the imaging unit.
10. The system of claim 9 , wherein the supplementary energy source is an arc lamp.
11. The system of claim 1 , wherein the elements of each energy source are inclined at an angle and inclination of each angle provides substantially uniform energy to the polymerizable material on the substrate.
12. The system of claim 1 , wherein each element of each energy source is positioned at a distance from a region of the substrate, and the position of each energy element provides substantially uniform energy to the polymerizable material on the substrate.
13. The system of claim 1 , wherein each element is in optical communication with an optical line to provide energy to the polymerizable material.
14. The system of claim 13 , wherein at least one energy element is positioned at a distance greater than 2 m from the polymerizable material on the substrate.
15. The system of claim 13 , further comprising at least one reflective element positioned in optical communication with at two energy elements of at least one energy source, the reflective element focusing energy from the at least two energy elements to the polymerizable material on the substrate.
16. The system of claim 1 , wherein at least one energy element of the energy source is a LED having a low unit power of approximately 3-20 mW/cm 2 .
17. The system of claim 1 , further comprising at least one optical element positioned adjacent to the energy source to direct the energy of at least one energy element to the substrate.
18. A method of imprinting, comprising,
positioning an imaging unit such that a viewing path of the imaging unit is in superimposition with a nano-imprint lithography template;
positioning a plurality of energy sources between the imaging unit and the nano-imprint lithography template, the positioning of the energy sources being outside of the viewing path of the imaging unit, wherein each energy source is configured to provide energy along an energy path and wherein the elements of each energy source are inclined at angles so as to provide substantially uniform energy within a region of a substrate;
positioning a substrate below the template, the substrate having a surface having a plurality of regions;
depositing polymerizable material on the regions of the substrate;
aligning the template and the substrate;
contacting the polymerizable material on the substrate with the template;
providing, by the energy sources, energy along the energy paths solidifying polymerizable material on each of the regions of the substrate; and,
separating the template from the solidified polymerizable material providing a patterned layer on the substrate.