Light emitting device and fabrication method thereof
View Patent ↗There is provided a method of fabricating a vertical light emitting diode. The method comprises the steps of: growing a low doped first conductive semiconductor layer on a sacrificial substrate; forming an aluminum layer on the low doped first conductive semiconductor layer; forming an AAO layer having a large number of holes formed therein by performing anodizing treatment of the aluminum layer; etching and patterning the low doped first conductive semiconductor layer using the aluminum layer with a large number of the holes as a shadow mask to expose a portion of the low doped first conductive semiconductor layer, thereby forming a large number of grooves; removing the aluminum layer remaining on the low doped first conductive semiconductor layer; sequentially forming a high doped first conductive semiconductor layer, an active layer and a second conductive semiconductor layer on the low doped first conductive semiconductor layer with a large number of the grooves; forming a metal reflective layer and a conductive substrate on the second conductive semiconductor layer; separating the sacrificial substrate; and forming an electrode pad on the other surface of the low doped first conductive semiconductor layer, the electrode pad being filled in a large number of the grooves to be in ohmic contact with the high doped first conductive semiconductor layer.
1. A light emitting diode (LED), comprising:
a first semiconductor layer having a plurality of grooves formed therein;
second semiconductor layer disposed on one surface of the first semiconductor layer, the second semiconductor layer being exposed by the plurality of the grooves of the first semiconductor layer;
an active layer and a third semiconductor layer, disposed on one surface of the second semiconductor layer;
a reflective layer and a conductive substrate, disposed on one surface of the third semiconductor layer the reflective layer disposed between the third semiconductor layer and the conductive substrate; and
a first electrode pad disposed on the other surface of the first semiconductor layer, the first electrode pad being filled in at least a portion of the grooves.
2. The LED of claim 1 , wherein the doping concentration of dopant in the second semiconductor layer is 5 to 9×10 18 /cm 3 , and the doping concentration of dopant in the first semiconductor layer is below 5×10 18 /cm 3 .
3. The LED of claim 1 , wherein the first semiconductor layer has the plurality of the grooves formed through etching using an anodic aluminum oxide (AAO) layer as a shadow mask.
4. The LED of claim 2 , wherein the first and second semiconductor layers comprise the same dopants.
5. The LED of claim 4 , wherein the first and second semiconductor layers are n-type layers, and the third semiconductor layer is a p-type layer.
6. The LED of claim 1 , further comprising a second electrode pad, the second electrode pad being disposed between the third semiconductor layer and the reflective layer, and the second electrode pad facing the first electrode pad.
7. The LED of claim 1 , wherein the plurality of grooves each comprise a width of 500 nm or less.