Arrangement
The invention relates in general level to radiation transference techniques as applied for utilization of material handling. The invention relates to a radiation source arrangement comprising a path of radiation transference, or an improved path of radiation transference, which path comprises a scanner or an improved scanner. The invention also concerns a target material suitable for vaporization and/or ablation. The invention concerns an improved scanner. The invention concerns also to a vacuum vaporization/ablation arrangement that has a radiation source arrangement according to invention. The invention concerns also a target material unit, to be used in coating and/or manufacturing target material.
1. A method to produce plasma by photon radiation from a target body comprising target material having an ablation threshold and an absorbance of said photon radiation, comprising:
selecting an ablation area on the target body for the generation of plasma from a spot on said ablation area,
selecting a radiation geometry for said photon radiation, to focus said photon radiation onto the spot on said target body,
controlling ablation of said target body by:
controlling an ablation depth in said target body by adjusting a spot size of said photon radiation on said ablation area or by scaling the power of said photon radiation for said spot so that the photon radiation fluence exceeds the ablation threshold on said target body in the spot to a selected ablation depth defined by the absorbance of the target material in said spot, and
scaling a spot size and/or radiation power of said photon radiation so that the ratio of the spot size dimension to said ablation depth is adjusted to a constant value for said target area for the duration of the scanning with said radiation,
directing said photon radiation along a radiation path from a radiation source to said spot on the target body via a turbine scanner, in which reflective surfaces are faces of a polygon that is arranged to rotate around a rotation axis, and
generating said plasma by scanning said photon radiation so that said spot moves along an ablation path on said ablation area.
2. The method of claim 1 , wherein said photon radiation is pulsed to radiation pulses.
3. The method of claim 2 , comprising setting said turbine seamier to rotate so that at least two photon radiation pulses hit the target body at spots with at least partially overlapping areas.
4. The method according to any one of claim 2 or 3 , comprising selecting a pulse length smaller than a characteristic value of the target material that characterizes a relaxation time of the target structure for a thermal energy transference mechanism in said target structure.
5. The method according to claim 2 , comprising utilising an electric and/or magnetic field to direct the plasma and/or to collect particles that have a characteristic measure of size smaller than the value of said ablation depth.
6. The method according to claim 1 , comprising selecting said constant value for optimizing the kinetic energy of the plasma.
7. Use of a coating method according to claim 1 for printing and/or copying.
8. The method of claim 1 , wherein said ablation of said target body is cold ablation.
9. A coating method, comprising:
selecting an ablation area on a target body for the generation of plasma from a spot on said ablation area,
selecting a radiation geometry for a photon radiation, to focus said photon radiation onto the spot on said target body,
controlling ablation of said target body by:
controlling an ablation depth in said target body by adjusting a spot size of said photon radiation on said ablation area or by scaling the power of said photon radiation for said spot so that the photon radiation fluence exceeds the ablation threshold on said target body in the spot to a selected ablation depth defined by the absorbance of the target material in said spot, and
scaling a spot size and/or radiation power of said photon radiation so that the ratio of the spot size dimension to said ablation depth is adjusted to a constant value for said target area for the duration of the scanning with said radiation,
directing said photon radiation along a radiation path from a radiation source to said spot on the target body via a turbine scanner, in which reflective surfaces are faces of a polygon that is arranged to rotate around a rotation axis,
generating said plasma by scanning said photon radiation so that said spot moves along an ablation path on said ablation area, and
directing said plasma, generated from said target, onto a surface on a substrate body to be coated.
10. The coating method according to claim 9 , comprising optimising, via kinetic energy of said plasma, the adhesion of the plasma constituents onto said surface.
11. The coating method according to claim 10 , comprising boosting the kinetic energy of the plasma for improved adhesion onto said surface, wherein said boosting is implemented by accelerating said plasma constituents with an electric and/or magnetic field.
12. The coating method according to claim 11 , comprising selecting a further constituent for constituting the coating onto the surface via a chemical reaction of a substance originating from at least one of said target body and a material fed into the coating volume surrounding the substrate.
13. The coating method according to claim 12 , wherein a second target material is selected for ablation from a second spot, and
between said first spot and said second spot, plasma is generated from a third spot on a different ablation path than the ablation path that goes through said first and said second spots.
14. The coating method according to claim 13 , wherein said third spot is on a different ablation path and on a different target than said first and second spots.
15. The coating method according to claim 9 , wherein said ablation of said target body is cold ablation.