Semiconductor chip and semiconductor device
View Patent ↗There are provided a semiconductor device and a semiconductor chip, in which the interconnection is made to be highly reliable by stacking three or more layers of chips without contact therebetween. A semiconductor chip of the present invention comprises a first signal transmission circuit, a silicon substrate on which a first changeover switch is formed, and an interconnection layer on which a first capacitive-coupling upper electrode is formed, wherein a first capacitive-coupling lower electrode is additionally formed on the rear surface of the silicon substrate through a first via hole that penetrates the silicon substrate and, whereas the first capacitive-coupling upper electrode is directly connected to the first signal transmission circuit, the first capacitive-coupling lower electrode is connected to the first signal transmission circuit through the first via hole and through the first changeover switch.
1. A semiconductor chip including: a silicon substrate on which a first signal transmission circuit and a first changeover switch are formed;
an interconnection layer formed on said silicon substrate; and
a first capacitive-coupling upper electrode formed on said interconnection layer; said semiconductor chip comprising:
a first capacitive-coupling lower electrode that is formed on the rear surface of said silicon substrate through a first via hole that penetrates said silicon substrate, wherein said first capacitive-coupling upper electrode is directly connected to said first signal transmission circuit, and wherein said first capacitive-coupling lower electrode is connected to the first signal transmission circuit through the first via hole and said first changeover switch.
2. The semiconductor chip according to claim 1 , further comprising a second changeover switch that is formed on said silicon substrate, wherein said first capacitive-coupling upper electrode is connected to said first signal transmission circuit through said second changeover switch.
3. The semiconductor chip according to claim 2 , further comprising a third changeover switch that is formed on said silicon substrate, wherein said first capacitive-coupling upper electrode is connected to said first capacitive-coupling lower electrode through said third changeover switch and the first via hole.
4. The semiconductor chip according to claim 1 , further comprising a fourth changeover switch that is formed on said silicon substrate, and a second capacitive-coupling lower electrode that is formed on the rear surface of said silicon substrate through a second via hole that penetrates said silicon substrate, wherein said second capacitive-coupling lower electrode is connected to the first signal transmission circuit through the second via hole and through said fourth changeover switch.
5. The semiconductor chip according to claim 4 , further comprising: a second signal transmission circuit, a fifth changeover switch and a sixth changeover switch that are formed on said silicon substrate, and a second capacitive-coupling upper electrode that is formed on the interconnection layer, wherein said second capacitive-coupling upper electrode is directly connected to the second signal transmission circuit, wherein said first capacitive-coupling lower electrode is connected to the second signal transmission circuit through the first via hole and through said fifth changeover switch, and wherein the second capacitive-coupling lower electrode is connected to the second signal transmission circuit through the second via hole and through said sixth changeover switch.
6. The semiconductor chip according to claim 5 , further comprising: a seventh changeover switch, an eighth changeover switch, a ninth changeover switch and a tenth changeover switch that are formed on said silicon substrate, wherein said first capacitive-coupling upper electrode is connected to the first signal transmission circuit through said seventh changeover switch, wherein the first capacitive-coupling upper electrode is connected to the second signal transmission circuit through said eighth changeover switch, wherein the second capacitive-coupling upper electrode is connected to the first signal transmission circuit through said ninth changeover switch, and wherein the second capacitive-coupling upper electrode is connected to the second signal transmission circuit through said tenth changeover switch.
7. The semiconductor chip according to claim 1 , further comprising an amplifier that is connected in series with each of said changeover switches.
8. The semiconductor chip according to claim 7 , wherein an amplifier that has a switch is used in place of each pair of said changeover switches and said amplifiers.
9. A semiconductor device including a semiconductor chip including: a silicon substrate on which a first signal transmission circuit and a first changeover switch are formed; an interconnection layer formed on said silicon substrate; and a first capacitive-coupling upper electrode formed on the interconnection layer; said semiconductor, device comprising a first capacitive-coupling lower electrode that is formed on the rear surface of said silicon substrate through a first via hole that penetrates said silicon substrate, wherein said first capacitive-coupling upper electrode is directly connected to the first signal transmission circuit, and wherein said first capacitive-coupling lower electrode is connected to the first signal transmission circuit through the first via hole and through the first changeover switch.
10. The semiconductor device according to claim 9 , further comprising a second changeover switch that is formed on said silicon substrate, wherein said first capacitive-coupling upper electrode is connected to the first signal transmission circuit through said second changeover switch.
11. The semiconductor device according to claim 10 , further comprising a third changeover switch that is formed on said silicon substrate, wherein the first capacitive-coupling upper electrode is connected to said first capacitive-coupling lower electrode through said third changeover switch and through the first via hole.
12. The semiconductor device according to claim 9 , further comprising a fourth changeover switch that is formed on the silicon substrate, and a second capacitive-coupling lower electrode that is formed on the rear surface of said silicon substrate through a second via hole that penetrates said silicon substrate, wherein said second capacitive-coupling lower electrode is connected to the first signal transmission circuit through the second via hole and through said fourth changeover switch.
13. The semiconductor device according to claim 12 , further comprising a second signal transmission circuit, a fifth changeover switch and a sixth changeover switch that are formed on the silicon substrate, and a second capacitive-coupling upper electrode that is formed on the interconnection layer, wherein the second capacitive-coupling upper electrode is directly connected to the second signal transmission circuit, wherein said first capacitive-coupling lower electrode is connected to the second signal transmission circuit through the first via hole and through said fifth changeover switch, and wherein said second capacitive-coupling lower electrode is connected to the second signal transmission circuit through the second via hole and through said sixth changeover switch.
14. The semiconductor device according to claim 13 , further comprising a seventh changeover switch, an eighth changeover switch, a ninth changeover switch and a tenth changeover switch that are formed on the silicon substrate, wherein said first capacitive-coupling upper electrode is connected to the first signal transmission circuit through said seventh changeover switch, wherein the first capacitive-coupling upper electrode is connected to the second signal transmission circuit through said eighth changeover switch, wherein the second capacitive-coupling upper electrode is connected to the first signal transmission circuit through said ninth changeover switch, and wherein the second capacitive-coupling upper electrode is connected to the second signal transmission circuit through said tenth changeover switch.
15. The semiconductor device according to claim 9 , further comprising an amplifier that is connected in series with each of said changeover switches.
16. The semiconductor device according to claim 15 , wherein an amplifier that has a switch is used in place of each pair of said changeover switches and the amplifiers.