Method of manufacturing a semiconductor device
View Patent ↗A semiconductor device manufacturing method comprising the steps of providing a matrix substrate having a main surface with plural device areas formed thereon, fixing plural semiconductor chips to the plural device areas respectively, then sealing the plural semiconductor chips all together with resin to form a block sealing member, dividing the block sealing member and the matrix substrate for each of the device areas by dicing, thereafter rubbing a surface of each of the diced sealing member portions with a brush, then storing semiconductor devices formed by the dicing once into pockets respectively of a tray, and conveying the semiconductor devices each individually from the tray. Since the substrate dividing work after block molding is performed by dicing while vacuum-chucking the surface of the block sealing member, the substrate division can be done without imposing any stress on an external terminal mounting surface of the matrix substrate.
1. A method of manufacturing a semiconductor device, comprising the steps of:
(a) providing a wiring substrate having a main surface, a plurality of device areas formed on the main surface, and a back surface opposed to the main surface;
(b) mounting a plurality of semiconductor chips on the plurality of device areas, respectively;
(c) forming a block sealing member over the main surface of the wiring substrate, the block sealing member covering the plurality of semiconductor chips;
(d) after the step (c), dividing the block sealing member and the wiring substrate, and obtaining a plurality of individual semiconductor devices;
(e) after the step (d), arranging a number of first individual semiconductor devices of the plurality of individual semiconductor devices on a stage in a zig-zag manner;
(f) after the step (e), picking up the first individual semiconductor devices from the stage and and transferring them into a plurality of pockets of a tray.
2. A method of manufacturing a semiconductor device according to claim 1 , wherein a plan shape of each of the plurality of individual semiconductor devices is quadranglar;
wherein a plan shape of each of the plurality of pockets is quadranglar; and
wherein a guide is formed at each of four sides of each of the plurality of pockets.
3. A method of manufacturing a semiconductor device according to claim 2 , wherein the wiring substrate has a dicing area arranged between adjacent device areas; and
wherein in the step (d), the block sealing member and the wiring substrate are divided into the plurality of individual semiconductor devices by running a blade from the back surface of the wiring substrate and along the dicing area.
4. A method of manufacturing a semiconductor device according to claim 3 , wherein a width of the blade is 0.2 mm.
5. A method of manufacturing a semiconductor device according to claim 1 , wherein after the step (c) and before the step (d), a plurality of external terminals are attached on the back surface of the wiring substrate such that the plurality of external terminals are corresponding to the plurality of device areas, respectively.
6. A method of manufacturing a semiconductor device according to claim 1 , wherein after the step (d) and before the step (e), the plurality of individual semiconductor devices are washed and dried.
7. A method of manufacturing a semiconductor device according to claim 1 , wherein each of the plurality of individual semiconductor devices has a sealing member comprising a portion of the block sealing member; and
wherein after the step (e) and before the step (f), a surface of the sealing member of each of the plurality of individual semiconductor devices is rubbed using a brush.