Polycrystalline complex-shaped mesoscale components
A polycrystalline mesoscale component, formed through a process including filing a mold cavity formed in a photoresist with a mold fill, is provided with an overall length L divided into multiple segments with a second segment extending from a first segment at a nonlinear angle. The first segment has a first segment height H1 and a first segment thickness T1, while the second segment has a second segment height H2 and a second segment thickness T2, with the lesser of H1 and H2 defining a minimum segment height Hmin and the lesser of T1 and T2 defining a minimum segment thickness Tmin. The resultant component has a ratio of L:Hmin:Tmin of 20-80:1:0.5-10 where Hmin is between 5 and 500 microns. In specific instances, the nonlinear angle is acute, the multiple segments are rectilinear in cross section, and a segment thickness has an edge resolution of between 0.1 and 2 microns.
1. A polycrystalline mesoscale component having an overall length L divided into at least a first segment and a second segment, the second segment extending from the first segment at a nonlinear angle, the first segment having a first segment height H 1 , and a first segment thickness T 1 , the second segment having a second segment height H 2 and a second segment thickness T 2 , the lesser of H 1 and H 2 defining a minimum segment height H min and the lesser of T 1 and T 2 defining a minimum segment thickness T min , the component having a ratio of L:H min :T min of 20-80:1:0.5-10 where the H min is between 5 and 500 microns.
2. The component of claim 1 wherein the ratio is greater than 40:1:0.5-3.
3. The component of claim 1 wherein the angle is acute.
4. The component of claim 1 wherein the first segment and the second segment are rectilinear in cross section.
5. The component of claim 1 wherein a planar surface area of the overall length and height of the component is less than 40% of the overall length times the overall height.
6. A polycrystalline mesoscale component having an overall length L divided into at least a first segment and a second segment, the second segment extending from the first segment at a nonlinear angle, the first segment having a first segment height H 1 , and a first segment thickness T 1 , the second segment having a second segment height H 2 and a second segment thickness T 2 , the lesser of H 1 and H 2 defining a minimum segment height H min and the lesser of T 1 and T 2 defining a minimum segment thickness T min , the component having a ratio of L:H min :T min of 20-80:1:0.5-10 where the H min is between 5 and 500 microns wherein a surface defining the first segment thickness has an edge resolution of between 0.1 and 2 microns.
7. The component of claim 6 wherein the edge resolution is less than 1 micron.
8. A polycrystalline mesoscale component having an overall length L divided into at least a first segment and a second segment, the second segment extending from the first segment at a nonlinear angle, the first segment having a first segment height H 1 , and a first segment thickness T 1 , the second segment having a second segment height H 2 and a second segment thickness T 2 , the lesser of H 1 and H 2 defining a minimum segment height H min and the lesser of T 1 and T 2 defining a minimum segment thickness T min , the component having a ratio of L:H min :T min of 20-80:1:0.5-10 where the H min is between 5 and 500 microns wherein the component has an average sintered grain size of between 50 nanometers and 10 microns and formed of a ceramic.
9. The component of claim 8 wherein a surface defining the first segment thickness has an edge resolution of between 0.1 and 2 microns.
10. The component of claim 9 wherein the edge resolution is less than 1 micron.
11. A polycrystalline mesoscale component having an overall length L divided into at least a first segment and a second segment, the second segment extending from the first segment at a nonlinear angle, the first segment having a first segment height H 1 , and a first segment thickness T 1 , the second segment having a second segment height H 2 and a second segment thickness T 2 , the lesser of H 1 and H 2 defining a minimum segment height H min and the lesser of T 1 and T 2 defining a minimum segment thickness T min , the component having a ratio of L:H min :T min of 20-80:1:0.5-10 where the H min is between 5 and 500 microns wherein the component has an average sintered grain size of between 100 nanometers and 100 microns and formed of a metal.
12. The component of claim 11 wherein a surface defining the first segment thickness has an edge resolution of between 0.1 and 2 microns.
13. The component of claim 12 wherein the edge resolution is less than 1 micron.
14. A polycrystalline mesoscale component formed from a ceramic having an overall length L divided into at least a first segment and a second segment, the second segment extending from the first segment at a nonlinear angle, the first segment having a first segment height H 1 , and a first segment thickness T 1 , the second segment having a second segment height H 2 and a second segment thickness T 2 , the lesser of H 1 and H 2 defining a minimum segment height H min and the lesser of T 1 and T 2 defining a minimum segment thickness T min , the component having a ratio of L:H min :T min of 20-80:1:0.5-10 where the H min is between 5 and 500 microns.
15. The component of claim 14 wherein a surface defining the first segment thickness has an edge resolution of between 0.1 and 2 microns.
16. The component of claim 15 wherein the edge resolution is less than 1 micron.
17. A polycrystalline mesoscale component formed from a metal having an overall length L divided into at least a first segment and a second segment, the second segment extending from the first segment at a nonlinear angle, the first segment having a first segment height H 1 , and a first segment thickness T 1 , the second segment having a second segment height H 2 and a second segment thickness T 2 , the lesser of H 1 and H 2 defining a minimum segment height H min and the lesser of T 1 and T 2 defining a minimum segment thickness T min , the component having a ratio of L:H min :T min of 20-80:1:0.5-10 where the H min is between 5 and 500 microns.
18. The component of claim 17 wherein a surface defining the first segment thickness has an edge resolution of between 0.1 and 2 microns.
19. The component of claim 18 wherein the edge resolution is less than 1 micron.